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Scientific and Technological Issues Related to Rare Earth Oxides: An Introduction

Chapter
Part of the Topics in Applied Physics book series (TAP, volume 106)

Abstract

Significant research effort is currently being devoted to study deposition, dielectric, and electronic properties of binary rare earth oxides, as well as of complex oxides based on rare earth elements. Most of the motivations justifying this effort are found in the field of microelectronics – especially in the search of high dielectric constant oxides as candidates to substitute SiO2 – and these will be mostly discussed. Open problems and issues from the scientific and technological point of view are discussed, and applications in fields other than microelectronics (such as spintronics) are also mentioned.

Keywords

71.55.-i; 72.80.Sk; 73.20.At; 75.47.Lx; 77.55.+f 

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Authors and Affiliations

  1. 1.CNR-INFM MDMNational LaboratoryAgrate Brianza (MI)Italy
  2. 2.Department of Physics and AstronomyUniversity of ÅårhusÅårhusDenmark

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