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Local Structure, Composition and Electronic Properties of Rare Earth Oxide Thin Films Studied Using Advanced Transmission Electron Microscopy Techniques (TEM-EELS)

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Rare Earth Oxide Thin Films

Part of the book series: Topics in Applied Physics ((TAP,volume 106))

Abstract

This contribution aims to demonstrate the ability of transmission electron microscopy (TEM) and its associated techniques, high-resolution transmission electron microscopy (HRTEM) and electron energy loss spectroscopy (EELS), to contribute to the understanding of the structural, chemical and electronic properties at the nanometre level of rare earth oxide (REO) thin films in the context of their potential use as alternative gate dielectrics to SiO2. A review of the existing work on binary REO and a preliminary work on atomic layer deposited (ALD) Lu2O3/Si stack as-grown and annealed are proposed.

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Authors and Affiliations

  1. Groupe NanoMatériaux CEMES/CNRS, BP 94347, 31055, Toulouse Cedex 04, France

    Sylvie Schamm

  2. CNR-INFM MDM National Laboratory, Via C. Olivetti 2, 20041, Agrate Brianza (MI), Italy

    Giovanna Scarel & Marco Fanciulli

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  1. Sylvie Schamm
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  2. Giovanna Scarel
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  3. Marco Fanciulli
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Marco Fanciulli Giovanna Scarel

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Schamm, S., Scarel, G., Fanciulli, M. Local Structure, Composition and Electronic Properties of Rare Earth Oxide Thin Films Studied Using Advanced Transmission Electron Microscopy Techniques (TEM-EELS). In: Fanciulli, M., Scarel, G. (eds) Rare Earth Oxide Thin Films. Topics in Applied Physics, vol 106. Springer, Berlin, Heidelberg . https://doi.org/10.1007/11499893_11

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  • DOI: https://doi.org/10.1007/11499893_11

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