Abstract
Owing to its physical properties, diamond is a very promising candidate for UV photon detection. The synthesis of very high quality polycrystalline diamond thick films and single crystals is presently accomplished routinely using the chemical vapour deposition (CVD) technique. Metal/diamond/metal ohmic junctions are produced by depositing electrical contacts on the front surface (coplanar contacts) or on both front and back (sandwich contacts). The investigation of diamond properties in the wavelength range 100–300 nm is of considerable interest in order to attain ultraviolet (UV) detectors having high quantum efficiency against no sensitivity to visible photons, along with radiation hardness and chemical inertness. Improvements in diamond synthesis techniques and processing technology now make available very high quality polycrystalline diamond films as well as optical-grade single crystals with dimensions sufficiently large for developing detectors. Several problems limiting the performance have been solved, and single-pixel detectors are close to being suitable for exploitation. This paper reviews the status of the art of diamond-based UV detectors, their application in specific fields, such as excimer lasers, photolithography and space experiments, and the perspectives.
Preview
Unable to display preview. Download preview PDF.
References
L. S. Pan, D. R. Kania, P. Pianetta, O. L. Landen: Appl. Phys. Lett. 57, 623 (1990)
D. R. Kania, M. I. Landstrass, M. A. Plano, L. S. Pan, S. Han: Diam. Relat. Mater. 2, 1012 (1993)
S. C. Binari, M. Marckywka, D. A. Koolbeck, H. B. Dietrich, D. Moses: Diam. Relat. Mat. 2, 1020 (1993)
R. D. McKeag, S. S. M. Chan, R. B. Jackman: Appl. Phys. Lett. 67, 2117 (1995)
M. D. Whitfield, R. D. McKeag, L. Y. S. Pang, S. S. M. Chan, R. B. Jackman: Diam. Relat. Mater. 5, 829 (1996)
R. D. McKeag, R. D. Marshall, B. Baral, S. S. M. Chan, R. B. Jackman: Diam. Relat. Mat. 6, 374 (1997)
S. Salvatori, R. Vincenzoni, M. C. Rossi, F. Galluzzi, F. Pinzari, E. Cappelli, P. Ascarelli: Diam. Relat. Mat. 6, 775 (1996)
S. Salvatori, E. Pace, M. C. Rossi, F. Galluzzi: Diam. Relat. Mater. 6, 361 (1997)
E. Pace, F. Galluzzi, M. C. Rossi, S. Salvatori, M. Marinelli, P. Paroli: Nucl. Instr. Meth. A 387, 255 (1997)
F. Galluzzi, M. Marinelli, L. Masotti, E. Milani, E. Pace, M. C. Rossi, S. Salvatori, M. Santoro, S. Sciortino, G. V. Rinati: Nucl. Instrum. Meth. A 409, 423 (1998)
F. Foulon, P. Bergonzo, C. Jany, A. Gicquel, T. Pochet: Nucl. Instrum. Meth. A 380, 42 (1996)
F. Foulon, P. Bergonzo, C. Jany, A. Gicquel, T. Pochet: Diam. Relat. Mater. 5, 732 (1996)
Ltd and Centronic House: King Henry's Drive New Addington, Surrey, UK
G. Davis: Diamond (Adam Hilger, Bristol 1984)
C. P. Klages: "The physics of diamond'', Proc. of Int. School of Physics E. Fermi, Course CXXXV (IOS, Amsterdam 1997) p. 355
A. T. Collins: "The physics of diamond'', Proc. of Int. School of Physics E. Fermi, Course CXXXV (IOS, Amsterdam 1997) p. 273
R. J. Neemanich, P. K. Bauman, A. T. Sowers, B. L. Ward: Proc. of 9th CIMITEC-WORLD Ceramic Congress and Forum on New Materials (Florence, Italy 1999) p. 217
R. Sporl, R. Heidinger, C. Wild, R. Schwab, P. Koidl: Proc. of 9th CIMTEC-WORLD Ceramic Congress and Forum on New Materials (Florence, Italy 1999) p. 325
C. S. J. Pickels, J. R. Brandon, S. E. Coe, R. S. Sussmann: Proc. of 9th CIMITEC-World Ceramic Congress and Forum on New Materials (Florence, Italy 1999) p. 435
H. Nakahata, et al.: Japan J. Appl. Phys. 33, 324 (1994)
C. Jang, F. Foulon, P. Bergonzo, A. Tardieu: Proc. of the V Int. Symp. on Diamond Materials, vol. 97–32 (The Electrochem. Soc. Inc., Pennington NJ, USA 1998) p. 208
M. C. Rossi, S. Salvatori, F. Galluzzi: Proc. of the V Int. Symp. on Diamond Materials, vol. 97–32 (The Electrochem. Soc. Inc., Pennington NJ, USA 1998) p. 255
C. E. Nebel, M. Stutzman, F. Lacher, P. Koidl, R. Zachai: Diam. Relat. Mater. 7, 556 (1998)
O. Gauchin, et al.: Diam. Relat. Mater. 8, 886 (1999)
M. Nesladek, K. Meykens, L. Stals, M. Vanecek, J. Rosa: Phys. Rev. B 54, 5552 (1996)
M. Nesladek, L. Stals, A. Stesmans, K. Iakoubovskij, G. J. Adriaenssens, J. Rosa, M. Vanecek: Appl. Phys. Lett. 72, 3306 (1998)
H. Kawarada: "The physics of diamond", Proc. of Int. School of Physics E. Fermi, Course CXXXV (IOS, Amsterdam 1997) p. 505
T. Tachibana, J. Glass: Electronic device processing, in L. Pan, D. Kania (Eds.): Diamond: Electronic Properties and Applications (Kluwer Academic, Boston 1995) p. 319
G. Messina, S. Santangelo, A. Tucciarone: "The physics of diamond", Proc. of Int. School of Physics E. Fermi, Course CXXXV (IOS, Amsterdam 1997) p. 485
M. Werner, et al.: Diam. Relat. Mater. 5, 723 (1996)
M. A. Plano: Electronic device processing, in L. Pan, D. Kania (Eds.): Diamond: Electronic Properties and Applications (Kluwer Academic, Boston 1995) p. 349
L. S. Plano: Growth of cvd diamond for electronic applications, in L. Pan, D. Kania (Eds.): Diamond: Electronic Properties and Applications (Kluwer Academic, Boston 1995) p. 62
D. R. Kania: "The physics of diamond", Proc. of Int. School of Physics E. Fermi, Course CXXXV (IOS, Amsterdam 1997) p. 555
K. Meguro, Y. Ando, et al.: Proc. of 15th Diamond Symposium, vol. 12, NDFCT (2002) p. 125
D. Takeuchi, et al.: Phys. Stat. Sol. A 186, 269 (2001)
M. Stammler, H. Eisenbeiss, et al.: Diam. Relat. Mater. 11, 504 (2002)
T. Teraji, S. Mitani, et al.: Crystal Growth 235, 287 (2002)
J. Isberg, A. J. Whitehead, S. E. Coe, G. A. Scarsbrook: Science 297, 1670 (2002)
M. Kasu, N. Kobayashi: Diam. Relat. Mater. 12, 413 (2003)
O. A. Williams, R. B. Jackman: Diam. Relat. Mater. 13, 557 (2004)
J. Isberg, J. Hammersberg, H. Bernhoff, D. J. Twitchen, A. J. Whitehead: Diam. Relat. Mater. 13, 872 (2004)
R. Brescia, A. D. Sio, E. Pace, et al.: Phys. Stat. Sol. A 199, 113 (2003)
T. Teraji, C. Wang, S. Endo, T. Ito: Proc. of the Third International Symposium on Diamond Electronic Devices (2), vol. 11, NDFCT (2001) p. 313
J. Isberg, A. J. Whitehead, et al.: Diam. Relat. Mater. 13, 320 (2004)
J. H. Kaneko, T. Tanaka, et al.: Nucl. Instrum. Meth. A 505, 187 (2003)
O. A. Williams, R. B. Jackman: Diam. Relat. Mater. 13, 325 (2004)
E. Pace: Recent Res. Devel. Optical Eng. 2, 317 (1999)
M. Marinelli, E. Milani, E. Pace, A. Paoletti, M. Santoro, S. Sciortino, A. Tucciarone, G. V. Rinati: Proc. of the V Int. Symp. on Diamond Materials, vol. 97–32 (The Electrochem. Soc. Inc., Pennington NJ, USA 1998) p. 556
F. Prins: ``The physics of diamond'', Proc. of Int. School of Physics E. Fermi, Course CXXXV (IOS, Amsterdam 1997) p. 411
P. Gonon, S. Prawer, D. N. Jamieson, K. W. Nugent: Diam. Relat. Mater. 6, 673 (1997)
C. Gu, et al.: Diam. Relat. Mater. 6, 673 (1997)
E. Pace, et al.: Proc. SPIE 4498, 121 (2001)
J. F. Hochedez, P. Lemaire, E. Pace, U. Schühle, E. Verwichte: ESA Proceedings ``Solar Encounter: The First Solar Orbiter Workshop'', vol. SP-493 (2001) p. 245
R. D. McKeag, R. B. Jackman: Diam. Relat. Mater. 7, 513 (1998)
P. Bergonzo, D. Tromson, C. Mer: Semicond. Sci. Technol. 18, S105 (2003)
E. Lefeuvre, M.-C. Castex, J. Achard, A. Tardieu, C. Beuille, H. Schneider: Diam. Relat. Mater. 12, 642 (2003)
F. Spaziani, M. C. Rossi, S. Salvatori, G. Conte: Diam. Relat. Mater. 13, 814 (2004)
E. Pace, A. D. Sio: Nucl. Instrum. Meth. A 514, 93 (2003)
A. D. Sio, et al.: Diam. Relat. Mater. 12, 1819 (2003)
R. Brescia, A. D. Sio, E. Pace, M. C. Castex: Diam. Relat. Mat. 13, 938 (2004)
M. D. Whitfield, S. P. Lansley, O. Gaudin, R. D. McKeag, N. Rizvi, R. B. Jackman: Phys. Stat. Sol. A 181, 121 (2000)
K. Hayashi, et al.: Diam. Relat. Mater. 10, 1794 (2001)
M. D. Whitfield, S. P. Lansley, O. Gaudin, R. D. McKeag, N. Rizvi, R. B. Jackman: Phys. Stat. Sol. A 185, 99 (2001)
F. Foulon, et al.: J. Appl. Phys. 84, 5331 (1998)
P. Gonon, S. Prawer, Y. Boiko, D. N. Jamieson: Diam. Relat. Mater. 6, 860 (1997)
S. Salvatori, M. C. Rossi, F. Galluzzi, D. Riedel, M. C. Castex: Diam. Relat. Mater. 8, 871 (1999)
C. Y. Fong, B. M. Klein: Diamond: Electronic Properties and Applications (Kluwer Academic, Boston, USA 1995) p. 1
P. K. Bachmann, et al.: Diam. Relat. Mater. 1, 1 (1991)
M. Marinelli, et al.: J. Appl. Phys. 76, 5702 (1994)
M. Marinelli, et al.: J. Appl. Phys. 89, 1430 (2001)
M. Marinelli, et al.: Phys. Rev. B 64, 195205 (2001)
M. Marinelli, E. Milani, M. Montuori, A. Paoletti, P. Paroli, J. Thomas: Appl. Phys. Lett. 65, 2839 (1994)
S. Zhao: Characterization of the electrical properties of polycrystalline diamond films, Phd thesis, The Ohio State University (1994)
H. Watanabe, D. Takeuchi, S. Yamanaka, H. Okushi, K. Kajimura, T. Sekiguchi: Diam. Relat. Mater. 8, 1272 (1999)
D. Takeuchi, H. Watanabe, S. Yamanaka, H. Okushi: vol. 9 (2000) p. 231
Y. K. Vohra, A. Israel, S. A. Catledge: Appl. Phys. Lett. 71, 321 (1997)
H. Okushi, H. Watanabe, S. Ri, S. Yamanaka, D. Takeuchi: J. Cryst. Growth 237–239, 1269
G. S. Gildenblat, S. A. Grot, A. Badzian: Proc. IEEE 79, 647 (1991)
T. Ito, M. Nishimura, M. Yokoyama, M. Irie, C. Wang: Diam. Relat. Mater. 9, 1561 (2000)
E. Pace, R. D. Benedetto, S. Scuderi: Diam. Relat. Mater. 9, 987 (2000)
J. F. Hochedez, et al.: Diam. Relat. Mater. 10, 673 (2001)
M. D. Whitfield, S. P. Lansely, O. Gaudin, R. D. McKeag, N. Rizvi, R. B. Jackman: Diam. Relat. Mater. 10, 693 (2001)
P. Bergonzo, A. Brambilla, D. Tromson, C. Mer, C. Hordequin, B. Guizard, F. Foulon, V. A. Solé, C. Gauthier: Diam. Relat. Mater. 9, 960 (2000)
S. Salvatori, M. C. Rossi, F. Galluzzi, E. Pace, P. Ascarelli, M. Marinelli: Diam. Relat. Mater. 7, 811 (1998)
D. Palik: Handbook of Optical Constants of Solids II (Academic, New York 1991)
S. M. Sze: Physics of Semiconductor Devices, 2 ed. (Wiley, New York 1981)
E. Pace, R. D. Benedetto, S. Scuderi: Diam. Relat. Mater. 9, 987 (2000)
E. Pace, A. Vinattieri, A. Pini, F. Bogani, M. Santoro, Y. Sato: Phys. Stat. Sol. A 181, 91 (2000)
J. Alvarez, et al.: Diam. Relat. Mat. 13, 881 (2004)
J. F. Hochedez, et al.: Diam. Relat. Mater. 10, 673 (2001)
M. G. Donato, G. Faggio, M. Marinelli, G. Messina, E. Milani, A. Paoletti, S. Santangelo, A. Tucciarone, G. V. Rinati: Diam. Relat. Mater. 10, 1788 (2001)
M. G. Donato, G. Faggio, M. Marinelli, G. Messina, E. Milani, S. Santangelo, G. V. Rinati: Thin Solid Films: Applications, Preparation and Characterisation, Research Signpost (Kerala 2003) pp. 1–16
G. Faggio, G. Messina, S. Santangelo, G. V. Rinati: Microsyst. Technol. 5, 151 (1999)
G. Faggio, M. Marinelli, G. Messina, E. Milani, A. Paoletti, S. Santangelo, G. V. Rinati: Microsyst. Technol. 6, 23 (1999)
M. Marinelli, E. Milani, E. Pace, A. Paoletti, M. Santoro, S. Sciortino, A. Tucciarone, G. V. Rinati: Diam. Relat. Mater. 7, 1039 (1998)
C. Jany, F. Foulon, P. Bergonzo, A. Brambilla, F. Silva, A. Gicquel, T. Pochet: Diam. Relat. Mat. 5, 741 (1996)
P. Gonon, S. Prawer, Y. Boiko, D. N. Jamiesson: Diam. Relat. Mat. 6, 860 (1997)
J. Hiscock, A. T. Collins: Diam. Relat. Mater. 8, 1753 (1999)
M. D. Whitfield, S. P. Lansley, O. Gaudin, R. D. McKeag, N. Rizvi, R. B. Jackman: Diam. Relat. Mater. 10, 650 (2001)
M. D. Whitfield, S. P. Lansley, O. Gaudin, R. D. McKeag, N. Rizvi, R. B. Jackman: Diam. Relat. Mater. 10, 715 (2001)
E. Pace, A. D. Sio: Nucl. Instrum. Meth. A 514, 93 (2003)
A. D. Sio, et al.: Diam. Relat. Mater. 12, 1819 (2003)
S. Ramo: Proc. Inst. Radio Eng. 27, 584 (1939)
S. P. Lansley, et al.: Diam. Relat. Mater. 12, 677 (2003)
J. Achard, R. Sussmann: Private communication (2004)
A. D. Sio, J. Achard, A. Tallaire, R. S. Sussmann, A. T. Collins, F. Silva, E. Pace: Appl. Phys. Lett. 86, 213504 (2005)
A. Yariv: Optical Electronics (Saunders College Publishing, USA 1991) p. 399
M. Marckywka, S. C. Binari, P. E. Pehrsson, D. Moses: SPIE Proc. 2282, 20 (1994)
M. W. Geis, J. A. Gregory, B. B. Pate: IEEE Trans. Electr. Dev. 38 3, 619 (1991)
S. Salvatori, E. Pace, M. C. Rossi, F. Galluzzi: Mat. Sci. Eng. B 46, 105 (1997)
R. Stone, et al.: Nucl. Instrum. Meth. A 473, 136 (2001)
W. Adam, et al.: Nucl. Instrum. Meth. A 453, 141 (2000)
W. Adam, et al.: Nucl. Instrum. Meth. A 476, 706 (2002)
J. F. Hochedez, et al.: Diam. Relat. Mater. 11, 427 (2002)
J. Schein, et al.: Rev. Sci. Instrum. 73, 18 (2002)
A. Schulze-Briese, et al.: Nucl. Instrum. Meth. A 468–468, 230 (2001)
E. Pace, et al.: ESA Proc. ``Solar Encounter: The First Solar Orbiter Workshop'', vol. SP-493 (2001) p. 311
W. Ogiers, D. Uwaerts, et al.: Second Round Table on Micro-Nano Technologies for Space (ESA/ESTEC, Noordwijk, the Netherlands 1997)
B. Dierickx, G. Meynants, D. Scheffer: IEEE Workshop on Charge-Coupled Devices & Advanced Image Sensors (June 1997)
IMEC: Esa-ascmsa report p60280-ms-rp-001 also in http://www.imec.be/ fuga/publications/publ.html (March 1997)
G. Naletto, E. Pace, G. Tondello, A. Boscolo: Meas. Sci. Techn. 5, 1491 (1994)
K. Wilhelm, et al.: Solar Physics 162, 189 (1995)
P. Apte, M. Gower: SPIE 2375, 349 (1996)
P. T. Rumsby, E. C. Harvey, D. Thomas, N. H. Rizvi: SPIE 3184, 176 (1997)
M. C. Gower, J. Cashmore, C. Solomon, et al.: 3rd international symposium on 193 nm lithography
N. H. Rizvi, J. Cashmore, C. Solomon, P. Rumsby, M. Gower: Proc. SPIE 3183, 30 (1997)
H. Yoneda, K. I. Ueda, Y. Aikawa, K. Baba, N. Shohata: J. Appl. Phys. 83, 1730 (1998)
C. E. Nebel, M. Stutzmann, F. Lacher, P. Koidl, R. Zachai: Diam. Relat. Mater. 7, 556 (1998)
S. Salvatori, M. C. Rossi, F. Galluzzi, D. Reidal, M. C. Castex: Diam. Relat. Mater. 8, 871 (1999)
M. D. Whitfield, S. P. Lansley, O. Gaudin, R. D. McKeag, N. H. Rizvi, R. B. Jackman: Proc. of the VI Int. Symp. on Diamond Materials, vol. 99–32 (The Electrochem. Soc. Inc., Pennington NJ, USA 1999) p. 322
O. Gaudin, S. Watson, S. P. Lansley, H. J. Looi, M. D. Whitfield, R. B. Jackman: Diam. Relat. Mater. 8, 886 (1999)
J. Achard, et al.: Diam. Relat. Mater. 11, 423 (2002)
H. Yoneda, K. Ueda, Y. Aikawa, K. Baba, N. Shohata: J. Appl. Phys. 83, 1730 (1998)
S. Han, R. S. Wagner: Appl. Phys. Lett. 68, 3016 (1996)
R. Harbison: in Proc. of the First International Symposium on 157 nm Lithography, vol. 1 (Dana Point, California, USA 2000) p. 9
S. M. Hooker, P. T. Landsberg: Progress in Quantum Electronics 18, 227 (1994)
M. I. Landstrass, M. A. Plano, M. A. Moreno, S. McWilliams, L. S. Pan, D. R. Kania, S. Han: Diam. Relat. Mater. 2, 1033 (1993)
E. Pace, et al.: SPIE Proc. 4498, 121 (2001)
Author information
Authors and Affiliations
Editor information
Rights and permissions
About this chapter
Cite this chapter
Pace, E., De Sio, A., Scuderi, S. UV-Induced Photoconduction in Diamond. In: Messina, G., Santangelo, S. (eds) Carbon. Topics in Applied Physics, vol 100. Springer, Berlin, Heidelberg . https://doi.org/10.1007/11378235_23
Download citation
DOI: https://doi.org/10.1007/11378235_23
Published:
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-29531-0
Online ISBN: 978-3-540-35728-5
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)