Abstract
Pulsed laser deposition (PLD) is a versatile technique to synthesize films of a given material with strongly different properties. In this chapter we discuss the microstructure and structure of carbon films ranging from diamond-like carbon to tetrahedral amorphous carbon, to nanometer-sized cluster assembled films, depending on PLD process parameters. All films are hydrogen-free, as shown by FTIR spectroscopy, and result invariably structurally disordered. Carbon local hybridisation was checked by Raman spectroscopy, both visible and UV. Vacuum deposited films undergo a transition from mainly disordered graphitic to up to 80% tetrahedral amorphous carbon above a threshold laser energy density. The microstructure and morphology of the deposited films were studied in a complementary way by SEM and AFM. All vacuum deposited films appear featureless. Cluster assembled glass-like films display different growth modes, mainly depending on the deposited energy per laser pulse and nature-pressure of the ambient gas. Film morphology is correlated with the ballistic mechanisms that occur when plasma plume constituents interact with ambient gas atoms. Cluster formation in the plume is modelled, and we estimate the average number of atoms per cluster. Model predictions agree with cluster sizes deduced by Raman spectroscopy and observed by TEM imaging. ch:OssiMiotello Ossi-begin
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Ossi, P.M., Miotello, A. Pulsed Laser Deposition of Carbon Films: Tailoring Structure and Properties. In: Messina, G., Santangelo, S. (eds) Carbon. Topics in Applied Physics, vol 100. Springer, Berlin, Heidelberg . https://doi.org/10.1007/11378235_18
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DOI: https://doi.org/10.1007/11378235_18
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