Abstract
In order to reduce the thermal influences in laser machining of sapphire surface, effects of a short-pulse ultra-violet laser were investigated. For the UV laser, the Fifth harmonic generation (Fifth HG) wave of an Nd:YAG laser (wavelength:213nm) was utilized. Significant reduction of thermal damages on the surface was demonstrated with the Fifth HG pulses compared to longer wavelengths of the Nd:YAG laser. It was shown that the control of depth of bottom surface with reduced thermal influences was possible in lower fluence cases(less than 4J/cm2) with a homogenized beam and smooth surface roughness Ra < 300nm was obtainable.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
6. References
Tamura S. et al.: Laser Ablation of Sapphire with a Pulsed Ultra-Violet Laser Beam, Initiatives of Precision Engineering at the Beginning of a Millennium, p.224, 2001
Horisawa, H, Emura, H and Yasunaga, N, Surface machining characteristics of sapphire with fifth harmonic YAG laser pulses: Proc 4th Int Symp Appl Plasma Sci 2003, pp. 349–354, 2004.
Author information
Authors and Affiliations
Rights and permissions
Copyright information
© 2007 Springer-Verlag London Limited
About this paper
Cite this paper
Noji, T., Nakamura, K., Horisawa, H., Yasunaga, N. (2007). Micromachining Characteristics of Sapphire Surface with Fifth Harmonic Nd: YAG Lasers. In: Towards Synthesis of Micro-/Nano-systems. Springer, London. https://doi.org/10.1007/1-84628-559-3_73
Download citation
DOI: https://doi.org/10.1007/1-84628-559-3_73
Publisher Name: Springer, London
Print ISBN: 978-1-84628-558-5
Online ISBN: 978-1-84628-559-2
eBook Packages: EngineeringEngineering (R0)