5. Conclusions
This paper describes current technological seeds and backgrounds for development of advanced analyzer components, and proposed developement approaches for prototypes of advanced analyzers. Integrated advanced analyzing system is also proposed for practical applications.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Author information
Authors and Affiliations
Rights and permissions
Copyright information
© 2007 Springer-Verlag London Limited
About this paper
Cite this paper
Ohmori, H. et al. (2007). Research on Development of Advanced Analyzer Components with Ultraprecision. In: Towards Synthesis of Micro-/Nano-systems. Springer, London. https://doi.org/10.1007/1-84628-559-3_68
Download citation
DOI: https://doi.org/10.1007/1-84628-559-3_68
Publisher Name: Springer, London
Print ISBN: 978-1-84628-558-5
Online ISBN: 978-1-84628-559-2
eBook Packages: EngineeringEngineering (R0)