Sub-nanometer Smoothing of Diamond-turned Metal Surfaces using Ion Beams
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We investigated the smoothing effect of ion beam etching with the aid of a sacrificial layer on smoothly cut metal surfaces. Electroplating copper and electrolessplating nickelphosphor were used as specimens to compare their smoothness characteristics. The surfaces were turned by a single-crystal diamond tool, applied with photoresist as a sacrificial layer, and then processed using ion beams. As a result, the heights of the tool marks were successfully reduced on both surfaces, improving the surface roughness. In particular, for the nickel-phosphor, this technique was proven efficient for improving the surface roughness, allowing an rms surface roughness of sub-nanometer order.
KeywordsSmoothing Ion beam Diamond turning Metal Roughness Copper Nickel-phosphor
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