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Sub-nanometer Smoothing of Diamond-turned Metal Surfaces using Ion Beams

  • Frank Frost
  • Hideo Takino
  • Renate Fechner
  • Axel Schindler
  • Namiko Ohi
  • Kazushi Nomura
Conference paper

Abstract

We investigated the smoothing effect of ion beam etching with the aid of a sacrificial layer on smoothly cut metal surfaces. Electroplating copper and electrolessplating nickelphosphor were used as specimens to compare their smoothness characteristics. The surfaces were turned by a single-crystal diamond tool, applied with photoresist as a sacrificial layer, and then processed using ion beams. As a result, the heights of the tool marks were successfully reduced on both surfaces, improving the surface roughness. In particular, for the nickel-phosphor, this technique was proven efficient for improving the surface roughness, allowing an rms surface roughness of sub-nanometer order.

Keywords

Smoothing Ion beam Diamond turning Metal Roughness Copper Nickel-phosphor 

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References

  1. [1]
    Schindler A, Haensel T, Nickel A, Fechner R, Neumann H, Bigl F, (1993) Broad ion beam processing of large surfaces areas with nanometer precision, Proc. of the 7th International Precision Engineering Seminar (IPES), 88–99Google Scholar
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    Johnson LF, Ingersoll KA, Kahng D, (1982) Planarization of patterned surfaces by ion beam erosion, Appl. Phys. Lett. 40,7:636–638.CrossRefGoogle Scholar
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    Johnson LF, Ingersoll KA, (1983) Ion polishing with the aid of planarizing film, Appl. Opt., 22,8:1165–1167CrossRefGoogle Scholar
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    Fechner R, Schindler A, Haensel T, Bigl F, (1999) Sub-nanometer polishing of optical surfaces by ion beam planarization technique, Proc. of the 9th International Conference on Precision Engineering (ICPE), 249–254Google Scholar

Copyright information

© Springer-Verlag London Limited 2007

Authors and Affiliations

  • Frank Frost
    • 1
  • Hideo Takino
    • 2
  • Renate Fechner
    • 1
  • Axel Schindler
    • 1
  • Namiko Ohi
    • 2
  • Kazushi Nomura
    • 2
  1. 1.Leibniz-Institute for Surface Modification LeipzigLeipzig
  2. 2.Nikon CorporationJapan

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