Nanometer Deflection Control of AFM Probe by Irradiating Polarized Laser and its Application to Nano-Structuring Process
- 1.8k Downloads
Scanning probe microscopy (SPM) is expected most as a tool for a processing size of a single nanometer order. We present a new technique of processing that combined atomic force microscopy (AFM) with a polarization laser. It is a method of irradiating the laser on the lever of a cantilever for AFM. As a result of this method, we succeeded in generating the groove with less than 5 nm width and less than 2 nm depth on a gold thin film. We experimentally verified factors for this processing, evaluated experimental results, and aimed to improve processing accuracy and speed.
KeywordsAFM Polarization Laser Nano-Processing Cantilever Single Crystal Si Single Crystal SiC
Unable to display preview. Download preview PDF.
- K. Chuma, (2005) A study on surface integrity of SiC/Si layer and its nano-structured surface: MS thesis, Tokyo University Agriculture and TechnologyGoogle Scholar