Advertisement

Nanometer Deflection Control of AFM Probe by Irradiating Polarized Laser and its Application to Nano-Structuring Process

  • Daisuke Mezaki
  • Ken-ichiro Chuma
  • Akira Kakuta
  • Yuji Furukawa
Conference paper
  • 1.8k Downloads

Abstract

Scanning probe microscopy (SPM) is expected most as a tool for a processing size of a single nanometer order. We present a new technique of processing that combined atomic force microscopy (AFM) with a polarization laser. It is a method of irradiating the laser on the lever of a cantilever for AFM. As a result of this method, we succeeded in generating the groove with less than 5 nm width and less than 2 nm depth on a gold thin film. We experimentally verified factors for this processing, evaluated experimental results, and aimed to improve processing accuracy and speed.

Keywords

AFM Polarization Laser Nano-Processing Cantilever Single Crystal Si Single Crystal SiC 

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

6 References

  1. [1]
    D. M. Eigler, E. K. Schweizer, (1900) Positioning single atoms with a scanning tunnelling microscope: Nature 344:524–526CrossRefGoogle Scholar
  2. [2]
    V. A. Ukraintsev, J. T. Yates, Jr., (1996) Nanosecond laser induced single atom deposition with nanometer spatial resolution using a STM: Journal of Applied Physics 80:2561–2571CrossRefGoogle Scholar
  3. [3]
    M. H. Hong, S. M. Huang, B. S. Luk’yanchuk, T. C. Chong, (2003) Laser assisted surface nanopatterning: Sensors and Actuators A 108:69–74CrossRefGoogle Scholar
  4. [4]
    A. Kisanov, A. Kiselev, A. Stepanov, N. Polushkin, (2003) Femtosecond laser-induced nanofabrication in the near-field of atomic force microscope tip: Journal of Applied Physics 94:6822–6826CrossRefGoogle Scholar
  5. [5]
    J. Kiuchi, N. Yasumaru, (2003) Femtosecond-laser-induced nanostructures formed on hard thin films of TiN and DLC: Applied Physics A 76:983CrossRefGoogle Scholar
  6. [6]
    K. Chuma, (2005) A study on surface integrity of SiC/Si layer and its nano-structured surface: MS thesis, Tokyo University Agriculture and TechnologyGoogle Scholar

Copyright information

© Springer-Verlag London Limited 2007

Authors and Affiliations

  • Daisuke Mezaki
    • 1
  • Ken-ichiro Chuma
    • 1
  • Akira Kakuta
    • 2
  • Yuji Furukawa
    • 1
  1. 1.Tokyo University of Agriculture and TechnologyJapan
  2. 2.Tokyo Metropolitan UniversityJapan

Personalised recommendations