Microsystem Technologies for Automotive Applications

  • Yoshiki Ueno
  • Nobuaki Kawahara
Conference paper


Within the automotive industry, micro-electro-mechanical-systems (MEMS) technology has contributed to the improved performance, reliability and lower-cost sensors that support basic automobile functions, including driving, turning, and stopping. Future goals of the automobile industry must target the development of environmentally friendly cars that are capable of obtaining higher gas mileage, are safer, and more comfortable. Also, these cars should be capable of the reception and transmission of necessary information. At this time the automotive industry is currently focusing its R&D on ultra-low emission vehicles and intelligent transport systems (ITS). MEMS technology is expected to play an extremely important role in this future direction of R&D in the automotive field, particularly in achieving higher levels of safety. The integration of MEMS technology in various devices is essential so that the system maintains a high level of reliability and mass productivity. This paper discusses how MEMS technologies are used in current vehicles and will have been used in the future vehicles.


microsystem MEMS sensors engine control safe systems ITS fabrication technology DRIE AHS internet ITS 


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Copyright information

© Springer-Verlag London Limited 2007

Authors and Affiliations

  • Yoshiki Ueno
    • 1
  • Nobuaki Kawahara
    • 1
  1. 1.Research LaboratoriesDenso CorporationJapan

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