Conclusion
The semiconductor industry has already entered the world of nanotechnology. The impact of nanodimensions on materials and device properties has driven the introduction of new materials such as low-k inter-level dielectrics. This change in dimension and properties has also resulted in the need to develop new materials characterization capabilities. In addition, it is important to note that materials characterization will continue to play a critical role in the development of new nanoelectronic technology and in manufacturing process control.
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Diebold, A.C. (2005). Challenges to Advanced Materials Characterization for ULSI Applications. In: Zschech, E., Whelan, C., Mikolajick, T. (eds) Materials for Information Technology. Engineering Materials and Processes. Springer, London. https://doi.org/10.1007/1-84628-235-7_34
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