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TEM Characterization of Strained Silicon

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Materials for Information Technology

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© 2005 Springer-Verlag London Limited

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Morniroli, J.P., Albarède, P.H., Jacob, D. (2005). TEM Characterization of Strained Silicon. In: Zschech, E., Whelan, C., Mikolajick, T. (eds) Materials for Information Technology. Engineering Materials and Processes. Springer, London. https://doi.org/10.1007/1-84628-235-7_10

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  • DOI: https://doi.org/10.1007/1-84628-235-7_10

  • Publisher Name: Springer, London

  • Print ISBN: 978-1-85233-941-8

  • Online ISBN: 978-1-84628-235-5

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