6. Summary and Future Perspectives
Atom probe tomography is a powerful tool for the characterization of the size, morphology and composition of ultrafine features in a variety of materials. With the development of new forms of specimen preparation especially with focused ion beam milling systems, atom probe tomography should be extended to a wider variety of applications in nanotechnology.
The local electrode atom probe is a major advance in atom probe design and has greatly simplified the operation of the instrument. There is considerable scope for its continued improvement through increases in the area of analysis, mass resolution and overall data acquisition speed. New, more efficient and automated methods to analyze the three-dimensional data should be also forthcoming as the user base for atom probe tomography increases.
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Miller, M.K. (2005). Atom Probe Tomography. In: Yao, N., Wang, Z.L. (eds) Handbook of Microscopy for Nanotechnology. Springer, Boston, MA. https://doi.org/10.1007/1-4020-8006-9_8
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