Skip to main content

High-Resolution Scanning Electron Microscopy

  • Chapter
Handbook of Microscopy for Nanotechnology

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 169.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Hardcover Book
USD 219.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. M. Knoll, Z. Tech. Phys. 16 (1935) 497.

    Google Scholar 

  2. M. Von Ardenne, Z. Phys. 109 (1938) 553.

    Article  Google Scholar 

  3. M. Von Ardenne, Z. Tech. Phys. 19 (1938) 407.

    Google Scholar 

  4. M. Knoll and R. Theile, Z. Phys. 113 (1939) 260.

    Article  CAS  Google Scholar 

  5. V. K. Zworykin, J. Hillier, R. L. Snyder, ASTM Bulletin 117 (1942) 15.

    Google Scholar 

  6. C. W. Oatley, J. Appl. Phys. 53 (1982) R1.

    Article  CAS  ADS  Google Scholar 

  7. A. V. Crew and J. Wall, J. Mol. Biol. 48 (1970) 373.

    Article  Google Scholar 

  8. A. V. Crew, J. Wall and J. Langmore, Science 168 (1970) 1333.

    Article  Google Scholar 

  9. A. V. Crew, Rep. Progr. Phys. 43 (1980) 621.

    Article  ADS  Google Scholar 

  10. K.-R. Peters, Scanning Electron Microscopy 1982 (1982) 1359.

    Google Scholar 

  11. T. Nagatani, S. Saito, M. Sato, M. Yamada, Scanning Microscopy 1 (1987) 901.

    Google Scholar 

  12. D. Imeson, R. H. Milne, S. D. Berger, and D. McMullan, Ultramicroscopy 17 (1985) 243.

    Article  CAS  Google Scholar 

  13. J. Liu and J. M. Colwey, Ultramicroscopy 23 (1987) 463.

    Article  CAS  Google Scholar 

  14. J. Liu and J. M. Cowley, Scanning Microscopy 2 (1988) 63.

    Google Scholar 

  15. J. Liu and J. M. Cowley, Scanning Microscopy 2 (1988) 1957.

    CAS  Google Scholar 

  16. A. L. Bleloch, A. Howie and R. H. Milne, Ultramicroscopy 31 (1989) 99.

    Article  CAS  Google Scholar 

  17. D. C. Joy and J. B. Pawley, Ultramicroscopy 47 (1992) 80.

    Article  PubMed  CAS  Google Scholar 

  18. A. Howie, J. Microscopy 180 (1995) 192.

    CAS  Google Scholar 

  19. R. Darji and A. Howie, Micron 28 (1997) 95.

    Article  CAS  Google Scholar 

  20. J. Liu, Microsc. Microanal. 6 (2000) 388.

    PubMed  CAS  ADS  Google Scholar 

  21. D. C. Joy and C. S. Joy, Micron 27 (1996) 247.

    Article  Google Scholar 

  22. E. D. Boyes, Adv. Mater. 10 (1998) 1277.

    Article  CAS  Google Scholar 

  23. J. Liu, Mater. Characterization 44 (2000) 353.

    Article  CAS  Google Scholar 

  24. I. Mullerova and L. Frank, Scanning 15 (1993) 193.

    Google Scholar 

  25. J. Liu, International Journal of Modern Physics B16 (2002) 4387.

    Article  ADS  Google Scholar 

  26. G. D. Danilatos, Adv. Electron. El. Phys. 71 (1988) 109.

    CAS  Google Scholar 

  27. P. J. R. Uwins, Mater. Forum 18 (1994) 51.

    CAS  Google Scholar 

  28. R. L. Schalek and L. T. Drzal, Adv. Mater. 32 (2000) 32.

    CAS  Google Scholar 

  29. A. M. Donald, Nature Materials 2 (2003) 511.

    Article  PubMed  CAS  Google Scholar 

  30. L. Reimer, Scanning Electron Microscopy: Physics of Image Formation and Microanalysis, Springer-Verlag, New York (1998).

    Google Scholar 

  31. J. I. Goldstein, D. E. Newbury, P. Echlin, D. C. Joy, A. D. Romig, Jr., C. E. Lyman, C. Fiori and E. Lifshin, Scanning Electron Microscopy and X-Ray Microanalysis: A Text for Biologists, Materials Scientists, and Geologists, Plenum, New York (1992).

    Google Scholar 

  32. D. C. Joy, Monte Carlo Modeling for Electron Microscopy and Microanalysis, Oxford University Press, New York (1995).

    Google Scholar 

  33. E. Bauer, Rep. Prog. Phys. 57 (1994) 895.

    Article  CAS  ADS  Google Scholar 

  34. A. V. Crewe, J. Wall and L. M. Welter, J. Appl. Phys. 30 (1968) 5861.

    Article  Google Scholar 

  35. V. E. Cosslett, Optik 36 (1972) 85.

    Google Scholar 

  36. J. Ximen, Z. Shao and P. S. D. Lin, J. Microsc. 170 (1993) 119.

    Google Scholar 

  37. A. V. Crewe, Ultramicroscopy 23 (1987) 159.

    Article  Google Scholar 

  38. J. E. Barth and P. Kruit, Optik 101 (1996) 101.

    Google Scholar 

  39. J. Zach and M. Haider, Nuclear Instruments and Methods in Physics Research A363 (1995) 316.

    ADS  Google Scholar 

  40. M. Lenc and I. Mullerova, Ultramicroscopy 41 (1992) 411.

    Article  Google Scholar 

  41. P. Kruit and G. H. Jansen, in Handbook of Charged Particle Optics, J. Orloff (Ed.), pp. 275–318, CRC Press, New York (1997).

    Google Scholar 

  42. Z. J. Ding and R. Shimizu, Scanning 18 (1996) 92.

    Article  CAS  Google Scholar 

  43. J. Liu and J. M. Colwey, Ultramicroscopy 37 (1990) 50.

    Article  Google Scholar 

  44. J. Drucker, M. R. Scheinfein, J. Liu and J. K. Weiss, J. Appl. Phys. 74 (1993) 7329.

    Article  CAS  ADS  Google Scholar 

  45. H. Mullejans, A. L. Bleloch, A. Howie and M. Tomita, Ultramicroscopy 52 (1993) 360.

    Article  CAS  Google Scholar 

  46. A. Howie, J. Microscopy 180 (1995) 192.

    CAS  Google Scholar 

  47. D. Imeson, J. Microscopy 147 (1987) 65.

    CAS  Google Scholar 

  48. J. Liu and J. M. Cowley, Ultramicroscopy 31 (1990) 119.

    Article  Google Scholar 

  49. J. Liu and G. E. Spinnler, in: Proceedings 50 th Annual Meeting of EMSA (1992), San Francisco Press, San Francisco, pp. 1288–1289.

    Google Scholar 

  50. J. Liu, R. L. Ornberg and J. R. Ebner, Microscopy and Microanalysis, Vol. 3,Suppl. 2 (1997) 1123.

    Google Scholar 

  51. G. W. Jones and J. A. Venables (1985) Ultramicroscopy 18 (1985) 439.

    Article  CAS  Google Scholar 

  52. J. A. Venables and J. Liu, in: the Encyclopedia of Surface and Colloid Science, A. P. Hubbard (Ed.), Marcel Dekker (2002).

    Google Scholar 

  53. Y. Homma, M. Suzuki, and M. Tomita, Appl. Phys. Lett. 62 (1993) 3276.

    Article  CAS  ADS  Google Scholar 

  54. D. D. Perovic, M. R. Castell, A. Howie, C. Lavoie, T. Tiedje, and J. S. W. Cole, Ultramicroscopy 58 (1995) 104.

    Article  CAS  Google Scholar 

  55. P. W. Tasker, Adv. In Ceramics 10 (1984) 176.

    CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 2005 Kluwer Academic Publishers

About this chapter

Cite this chapter

Liu, J. (2005). High-Resolution Scanning Electron Microscopy. In: Yao, N., Wang, Z.L. (eds) Handbook of Microscopy for Nanotechnology. Springer, Boston, MA. https://doi.org/10.1007/1-4020-8006-9_11

Download citation

Publish with us

Policies and ethics