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Micromechanical Sensors

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Introduction to Nanoscale Science and Technology

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Authors and Affiliations

  1. Oak Ridge National Laboratory and University of Tennessee, Knoxville, TN

    P. G. Datskos, N. V. Lavrik & M. J. Sepaniak

Authors
  1. P. G. Datskos
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  2. N. V. Lavrik
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  3. M. J. Sepaniak
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Editors and Affiliations

  1. Department of Physics, University of California, San Diego La Jolla, CA

    Massimiliano Di Ventra

  2. Department of Electrical and Systems Engineering, The University of Pennsylvania, Philadelphia, PA

    Stephane Evoy

  3. Department of Physics, Virginia Polytechnic Institute and State University, Blacksburg, VA

    James R. Heflin Jr.

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Datskos, P.G., Lavrik, N.V., Sepaniak, M.J. (2004). Micromechanical Sensors. In: Di Ventra, M., Evoy, S., Heflin, J.R. (eds) Introduction to Nanoscale Science and Technology. Nanostructure Science and Technology. Springer, Boston, MA. https://doi.org/10.1007/1-4020-7757-2_18

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  • DOI: https://doi.org/10.1007/1-4020-7757-2_18

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