Abstract
The fabrication of nanostructures involves two main processes: lithography, which creates the desired pattern, and the etching process realizing the structure in a material. The paper gives an overview of lithographic and dry etching processes, showing a number of examples and some up-to-date top achievements of these techniques.
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© 2006 Springer
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Kassing, R. (2006). Fabrication of Nanostructures. In: Kassing, R., Petkov, P., Kulisch, W., Popov, C. (eds) Functional Properties of Nanostructured Materials. Nato Science Series, vol 223. Springer, Dordrecht. https://doi.org/10.1007/1-4020-4594-8_7
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DOI: https://doi.org/10.1007/1-4020-4594-8_7
Publisher Name: Springer, Dordrecht
Print ISBN: 978-1-4020-4595-0
Online ISBN: 978-1-4020-4594-3
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)