Abstract
Protective coatings for tools and components are nowadays required in an increasingly demanding and sophisticated profile with respect to the desired mechanical, tribological, physical or chemical properties. Frequently, the necessary requirements can only be realized by multi-functional coatings through a nano-scale thin film design and the selection of materials with outstanding properties.
Keywords
- Substrate Temperature
- Boron Nitride
- Substrate Bias
- Coating Concept
- Plasma Assisted Chemical Vapour Deposition
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Ulrich, S., Nold, E., Sell, K., StÜber, M., Ye, J., Ziebert, C. (2006). Nano-Scale, Multi-Functional, Cubic Boron Nitride Coatings. In: Kassing, R., Petkov, P., Kulisch, W., Popov, C. (eds) Functional Properties of Nanostructured Materials. Nato Science Series, vol 223. Springer, Dordrecht. https://doi.org/10.1007/1-4020-4594-8_19
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DOI: https://doi.org/10.1007/1-4020-4594-8_19
Publisher Name: Springer, Dordrecht
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