Active Control Strategies for Vibration Isolation
In the fields of high-resolution metrology and manufacturing, effective anti-vibration measures are required to obtain precise and repeatable results. This is particularly true when the amplitudes of ambient vibration and the dimensions of the investigated or manufactured structure are comparable, e.g. in sub-micron semiconductor chip production, holographic interferometry, confocal optical imaging, and scanning probe microscopy. In the active antivibration system examined, signals are acquired by extremely sensitive vibration detectors, and the vibration is reduced using a feedback controller to drive electrodynamic actuators. This paper deals with the modeling and control of this anti-vibration system. First, a six-degree-of-freedom rigid body model of the system is developed. The unknown parameters of the unloaded system, including actuator transduction constants, spring stiffness, damping, moments of inertia, and the vertical position of the center of mass, are determined by comparing measured transfer functions to those calculated using the updated model. Finally, two different strategies for actively controlling the vibration isolation system are considered.
Key wordsactive vibration isolation MIMO control parameter identification SISO control six-degree of-freedom rigid body
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- 1.Fuller, C.R., Elliott, S.J. and Nelson, P.A., Active Control of Vibration, Academic Press, 1996.Google Scholar
- 2.Stöbener, U. and Gaul, L., “Piezoelectric Stack Actuator: FE Modeling and Application for Vibration Isolation,” in Proceedings of the NATO Advanced Study Institute on Responsive Systems for Active Vibration Control, Ed. A. Preumont, Kluwer Academic Publishers, Dordecht, 2001.Google Scholar
- 3.Hurlebaus, S., Smart Structures-Fundamentals and Applications, Lecture Notes, Institute A of Mechanics, University of Stuttgart, 2005.Google Scholar
- 4.Huang, X., Elliott, S.J. and Brennan, M.J., “Active Isolation of a Flexible Structure from Base Vibration,” Journal of Sound and Vibration, 263, 357–376.Google Scholar
- 5.Riebe, S. and Ulbrich, H., “Modeling and Online Computation of the Dynamics of a Parallel Kinematic with Six Degrees-of-Freedom,” Archive of Applied Mechanics, 72, 2003, 817–829.Google Scholar
- 6.Ginsberg, J.H., Advanced Engineering Dynamics, 2nd edn., Cambridge University Press, New York, 1995.Google Scholar
- 7.Beadle, B.M., Hurlebaus, S., Stöbener, U. and Gaul, L., “Modeling and Parameter Identification of an Active Anti-Vibration System,” SPIE International Symposia in Smart Structures & Materials/NDE, San Diego, March 2005.Google Scholar
- 8.Van de Vegte, J., Feedback Control Systems, 3rd edn., Prentice Hall, NJ, 1994.Google Scholar