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Active Control for Lightweight Isolation Systems

  • Kazuto Seto
  • Masahiko Naruke
  • Taichi Watanabe
  • Hiroko Morino
Conference paper
Part of the Solid Mechanics and its Applications book series (SMIA, volume 130)

Abstract

The isolation performance of a scaled three-dimensional active isolation system with a low stiffness isolation table assumed as a large-size, lightweight isolation system is reported. In a large-size but lightweight isolation table, there are multi vibration modes in a lower frequency region in the operational frequency. Thus, a 5-DOF reduced order model of control using a reduced order physical modeling method is applied for effectively controlling multi mode vibration in the vertical direction. In the horizontal direction, a rigid body model is created. For controller design, a 2-DOF controller combining a feedback controller with a feedforward controller is designed.

Key words

active isolation vibration control lightweight table modelling reduced order model LQ control feedforward control 

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References

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Copyright information

© Springer 2005

Authors and Affiliations

  • Kazuto Seto
    • 1
  • Masahiko Naruke
    • 1
  • Taichi Watanabe
    • 1
  • Hiroko Morino
    • 1
  1. 1.Department of mechanical EngineeringCollege of Science and Technology, Nihon UniversityTokyoJapan

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