Active Control for Lightweight Isolation Systems
The isolation performance of a scaled three-dimensional active isolation system with a low stiffness isolation table assumed as a large-size, lightweight isolation system is reported. In a large-size but lightweight isolation table, there are multi vibration modes in a lower frequency region in the operational frequency. Thus, a 5-DOF reduced order model of control using a reduced order physical modeling method is applied for effectively controlling multi mode vibration in the vertical direction. In the horizontal direction, a rigid body model is created. For controller design, a 2-DOF controller combining a feedback controller with a feedforward controller is designed.
Key wordsactive isolation vibration control lightweight table modelling reduced order model LQ control feedforward control
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