Abstract
This chapter discusses scheduling and dispatching in one of the most complex manufacturing environments — wafer fabrication facilities. These facilities represent the most costly and time-consuming portion of the semiconductor manufacturing process. After a brief introduction to wafer fabrication operations, the results of a survey of semiconductor manufacturers that focused on the current state of the practice and future needs are presented. Then the chapter presents a review of some recent dispatching approaches and finally an overview of a recent deterministic scheduling approach is provided.
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Pfund, M.E., Mason, S.J., Fowler, J.W. (2006). Semiconductor Manufacturing Scheduling and Dispatching. In: Herrmann, J.W. (eds) Handbook of Production Scheduling. International Series in Operations Research & Management Science, vol 89. Springer, Boston, MA. https://doi.org/10.1007/0-387-33117-4_9
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DOI: https://doi.org/10.1007/0-387-33117-4_9
Publisher Name: Springer, Boston, MA
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