This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsPreview
Unable to display preview. Download preview PDF.
References
Baudenbacher, F., Karl, H., Berberich, P., and Kinder, H., 1990, RHEED studies of epitaxial growth of YBCO films prepared by thermal co-evaporation, J. Less Common Met., 164&165:269.
Baudenbacher, F., 1997, Oberflächenmorphologie und Wachstumsmodus epitaktischer YBCO-Filme, Ph.D. thesis, Shaker Verlag, Aachen.
Bauer, M., Semerad, R., Kinder, H., Wiesmann, J., Dzick, J., and Freyhardt, H.C., 1998, Large area YBCO films on polycrystalline substrates with very high critical current densities, IEEE Trans. Appl. Supercond., 9:2244.
Bauer, M., Semerad, R., and Kinder, H., 1999, YBCO films on metal substrates with biaxially aligned MgO buffer layers, IEEE Trans. Appl. Supercond., 9:1502.
Berberich, P., Tate, J., Dietsche, W., and Kinder, H., 1989, Low-temperature preparation of superconducting YBCO films on Si, MgO, and SrTiO3 by thermal coevaporation, Appl. Phys. Lett., 53:925.
Berberich, P., Assmann, W., Prusseit, W., Utz, B., and Kinder, H., 1993, Large area deposition of YBCO films by thermal evaporation, J. Alloys & Comp., 195:271.
Berberich, P., Utz, B., Prusseit, W., and Kinder, H., 1994, Homogeneous high quality YBCO films on 3″ and 4″ substrates, Physica C, 219:497.
Bozovic I., Eckstein, J.N., Schlom, D.G., and Harris, J.S., Jr., 1990, in: Science and Technology of Thin Film Superconductors II, R. McConnell and S. Wolf, eds., Plenum Press, New York, p. 267.
Chang, L.L., Esaki, L., Howard, W.E., and Ludeke, R., 1973, J. Vac. Sci. Technol., 10:11.
Chew, N.G., Goodyear, S.W., Edwards, J.A., Satchell, J.S., Blankinsop, S.E., and Humphreys, R.G., 1990, Effect of small changes in composition on the electrical and structural properties of YBCO thin films, Appl. Phys. Lett., 57:2016.
Eckstein, J.N., Schlom, D.G., Hellman, E.S., von Dessonneck, K.E., Chen, Z.J., Webb, C., Turner, F., and Harris, J.S., Jr., 1989, Epitaxial growth of high temperature superconducting thin films, J. Vac. Sci. Technol. B, 7:319.
Eckstein, J.N., Bozovic, I., von Dessonneck, K.E., Schlom, D.G., Harris, J.S., Jr., and Baumann, S.M., 1990, Atomically layered heteroepitaxial growth of single crystal films of superconducting BSCCO, Appl. Phys. Lett., 57:931.
Eckstein, J.N., Bozovic, I., Klausmeier-Brown, M.E., Virshup, G.F., and Ralls, K.S., 1992, Atomically layered growth and properties of high temperature superconducting single-crystal films and superlattices, Thin Solid Films, 216:8.
Eckstein, J.N., Bozovic, I., Klausmeier-Brown, M.E., Virshup, G.F., and Ralls, K.S., 1992, Control of composition and microstructure in high temperature superconductors at the atomic level by molecular beam epitaxy, MRS-Bulletin, 17(8):27.
Egly, J., Nemetschek, R., Prusseit, W., Holzapfel, B., and DeBoer, B., 2000, YBCO-deposition on metal tape substrates, Proceedings of the EUCAS’99, IOP, London.
Hasegawa, K., Fujino, K., Mukai, H., Konishi, M., Hayashi, K., Sato, K., Honjo, S., Sato, Y., Ishii, H., and Iwata, Y., 1998, Biaxially aligned YBCO film tapes fabricated by all pulsed laser deposition, in: Applied Superconductivity, Vol. 4, Elsevier Science, Amsterdam, p. 487.
Kamei, M., Aoki, Y., Usui, T., and Morishita, T., 1992, In situ X-ray chemical analysis of YBCO films by RHEED-TRAXS, Jpn. J. Appl. Phys., 31:1326.
Kinder, H., Semerad, R., Berberich, P., Utz, B., and Prusseit, W., 1996, Very large area YBCO film deposition, Proc. SPIE, 2697:154.
Klausmeier-Brown, M.E., Eckstein, J.N., Bozovic, I., and Virshup, G.F., 1992, Accurate measurement of the atomic beam flux by pseudo-double-beam atomic absorption spectroscopy for growth of thin-film oxide superconductors, Appl. Phys. Lett., 60:657.
Kwo, J., Hong, M., Trevor, D.J., Fleming, R.M., White, A.E., Mannaerts, J.P., Farrow, R.C., Kortan, A.R., and Short, K.T., 1989, In situ growth of YBCO films by molecular beam epitaxy with an activated oxygen source, Physica C, 162–164:623.
Lu, C., Lightner, M.J., and Gogal, C.A., 1977, Rate controlling and composition analysis of alloy deposition processes by electron impact emission spectroscopy, J. Vac. Sci. Technol., 14:103.
Lu, C. and Guan, Y., 1995, Improved method of nonintrusive deposition rate monitoring by atomic absorption spectroscopy for physical vapor deposition processes, J. Vac. Sci. Technol. A, 13:1797.
Naito, M., 1991, A study of the compositional dependence of the quality of in situ grown YBCO films in e-beam coevaporation, Physica C, 185–189:1977.
Naito, M. and Sato, H., 1995, Stoichiometry control of atomic fluxes by precipitated impurity phase detection in growth of (Pr,Ce)2CuO4 and (La,Sr)2CuO4, Appl. Phys. Lett., 67:2557.
Prakash, S., Umarjee, D.M., Doerr, H.J., Deshpandey, C.V., and Bunshah, R.F., 1989, Superconducting films grown in situ by the activated reactive evaporation process, Appl. Phys. Lett., 55:504.
Prakash, S., Chou, K., Potwin, G., Deshprandey, C.V., Doerr, H.J., and Bunshah, R.F., 1990, Superconducting films grown by activated reactive evaporation for high frequency device applications, Supercond. Sci. Technol., 3:543.
Sato, H., Naito, M., and Yamamoto, H., 1997, Superconducting thin films of La2CuO4 by oxygen doping using ozone, Physica C, 280:178.
Shinohara, K., Matijasevic, V., Rosenthal, P.A., Marshall, A.F., Hammond, R.H., and Beasley, M.R., 1991, Anomalous compositional dependence in in situ growth of YBCO films at low oxygen pressure, Appl. Phys. Lett., 58:756.
Terashima, T., Bando, Y., Iijima, K., Yamamoto, K., and Hirata, K., 1988, Epitaxial growth of YBCO thin films on (110) SrTiO3 single crystals by activated reactive evaporation, Appl. Phys. Lett., 53:2232.
Terashima, T., Iijima, K., Yamamoto, K., Bando, Y., and Mazaki, H., 1988, Single crystal YBCO thin films by activated reactive evaporation, Jpn. J. Appl. Phys., 27:L91.
Terashima, T., Bando, Y., Iijima, K., Yamamoto, K., Hirata, K., Hayashi, K., Kamigaki, K., and Terauchi, H., 1990, RHEED oscillations during epitaxial growth of high temperature superconducting oxides, Phys. Rev. Lett., 65:2684.
Utz, B., Prusseit, W., and Kinder, H., 1995, Epitaxial Ba11−xKxBiO3 thin films on various substrates, in: Applied Superconductivity 1995, Conference series No. 148, D. Dew-Hughes, ed., IOP Publishing, Bristol, p. 823.
Utz, B., Semerad, R., Bauer, M., Prusseit, W., Berberich, P., and Kinder, H., 1997a, Deposition of YBCO and NdBCO films on areas of 9 inches in diameter, IEEE Trans. Appl. Supercond., 7:1272.
Utz, B., Rieder-Zecha, S., and Kinder, H., 1997b, Continuous YBCO film deposition by optically controlled reactive thermal co-evaporation, IEEE Trans. Appl. Supercond., 7:1181.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2005 Kluwer Academic Publishers
About this chapter
Cite this chapter
Prusseit, W. (2005). Methods of HTS Deposition: Thermal Evaporation. In: Goyal, A. (eds) Second-Generation HTS Conductors. Springer, Boston, MA. https://doi.org/10.1007/0-387-25839-6_6
Download citation
DOI: https://doi.org/10.1007/0-387-25839-6_6
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4020-8117-0
Online ISBN: 978-0-387-25839-3
eBook Packages: EngineeringEngineering (R0)