Skip to main content
SpringerLink
Log in

MOCVD Growth of YBCO Films for Coated Conductor Applications

  • Chapter
Second-Generation HTS Conductors

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 129.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 169.00
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 169.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  • Abrutis, A., Senateur, J.P., Weiss, F., Kubilius, V., Bigelyte, V., Saltyte, Z., Vengelis, B., and Juknas, A., 1998, Thin YBCO films on NdGaO3(001) substrate grown by injection MOCVD, Supercond. Sci. Technol., 10:959.

    Article  Google Scholar 

  • Becht, M. and Morishita, T., 1997, Preparation of buffer layers for HTS materials by MOCVD, J. Alloys and Compounds, 251:310.

    Article  Google Scholar 

  • Berry, A.D., Gaskill, D.K., Holm, R.T., Cukauskas, E.J., Kaplan, R., and Henry, R.L., 1988, Formation of high Tc superconducting films by organometallic chemical vapor deposition, Appl. Phys. Lett., 52:1743.

    Article  Google Scholar 

  • Busch, H., Fink, A., and Muller, A., 1991, High-quality YBa2Cu3O7−x films on large area by chemical vapor deposition, J. Appl. Phys., 79:2449.

    Article  Google Scholar 

  • Chen, Y.M., Ritums, D., Zhuang, W.W., Wu, N.J., and Ignatiev, A., 1998, Dielectric properties of (Ba,Sr)TiO3 films deposited by Photo-Assisted Metal Organic Chemical Vapor Deposition, in: Proc. of the 11thIEEE Intl. Symp. on Appl. of Ferroelectric, 96CH35948:43.

    Google Scholar 

  • Chern, C.S., Martens, J.S., Li, Y.Q., Galloios, B.M., Lu, P., and Kear, B.H., 1993, Metalorganic chemical vapor deposition of large area high quality YBa2Cu3O7−x films in a high speed rotating disc reactor, Supercond. Sci. Technol., 6:460.

    Article  Google Scholar 

  • Chou, P.C., Zhong, Q., Li Q.L., and Ignatiev, A., 1994, Optimization of Jc for photo-assisted MOCVD prepared YBCO thin films by Robust Design, Mat. Res. Symp. Proc., 335:279.

    Google Scholar 

  • Chou, P.C., Zhong, Q., Li, Q.L., Abazajian, K., Ignatiev, A., Wang, C.Y., Deal, E.E., and Chen, J.G., 1995, Optimization of Jc of YBCO thin films prepared by photo-assisted MOCVD through statistical Robust Design, Physica C, 254:93.

    Article  Google Scholar 

  • Dickenson, P.H., Geballe, T.H., Sanjurjo, A., Hildebrand, D., Craig, G., Zisk, M., Collman, J., Banning, S.A., and Sievers, R.E., 1989, Chemical vapor deposition of YBa2Cu3O7−x superconducting films, J. Appl. Phys., 66:444.

    Article  Google Scholar 

  • Drozdov, A. and Troyanov, S., 1995, Barium diketonates as precursors for HTSC thin films: Structure and properties, J. Physique, Colloque C5, 5:373.

    Google Scholar 

  • Ebihara, K., Fujishima, T., and Ikegami, T., 1993, Controlled superconducting transition of YBCO thin films prepared by plasma-enhanced MOCVD, IEEE Trans. Appl. Supercond., 3:976.

    Article  Google Scholar 

  • Endo, K., Moriyasu, Y., Misawa, S., and Yoshida, S., 1991, MOMBE growth of superconducting oxide thin films, Physica C, 185:1995.

    Article  Google Scholar 

  • Eulenburg, A., Romans, E.J., and Pegrum, C.M, 1999, Pulsed laser deposition of YBCO and NBCO using Experimental Design, Appl. Supercond., 9:2402.

    Article  Google Scholar 

  • Fenner, D.B., Viano, M., Fork, D.K., Connell, G.A.N., Boyce, J.B., Ponce, F.A., and Tramonatana, J.C., 1991, Reactions at the interface of thin films of Y-Ba-Cu and Zr-oxides with Si substrates, J. Appl. Phys., 69:2176.

    Article  Google Scholar 

  • Frohlich, K., Souc, J., Rosova, A., Machajdik, D., Graboy, I.E., Svetchinkov, V.L., Figueras, A., and Weiss, F., 1997, Superconducting YBa2Cu3O7−x films prepared by aerosol metal organic chemical vapor deposition on Al2O3 substrates with CeO2 buffer layer, Supercond. Sci. Technol., 10:657.

    Article  Google Scholar 

  • Garcia, G., Casado, J., Llibre, J., Doudkowski, M., Santiso, J., Figueras, A., Schamm, S., Dorignac, D., Grigis, Ch., and Aguilo, M., 1995, Preparation of YBCO on YSZ layers deposited on silicon and sapphire by MOCVD, J. Physique, Colloque 5, 5:439.

    Google Scholar 

  • Goto, T., Kuji, T., Jiang, Y.S., Moriya, M., Usami, K. and Kobayashi, T., 1999, Preparation of YBCO films on sapphire with CeO2 depopsited by ion beam sputtering, Appl. Supercond., 9:1653.

    Article  Google Scholar 

  • Goyal, A., Norton, D.P., Budai, J.D., Paranthaman, M., Specht, E.D., Kroeger, D.M., Christen, D.K., He, Q., Saffian, B., List, F.A., Lee, D.F., Martin, P.M., Klabunde, C.E., Hatfield, E., and Sikka, V.K., 1996, High critical current density superconducting tapes by epitaxial deposition of YBa2Cu3O7−x thick films on biaxially textured metals, Appl. Phys. Lett., 69:1795.

    Article  Google Scholar 

  • Hamaguchi, N., Gardiner, R., and Kirlin, P.S., 1991, MOCVD of TlBaCaCuO superconducting thin films: Structure-property-processing relationships, Appl. Surface Sci., 48:441.

    Article  Google Scholar 

  • Higashiyama, K., Hirabayshi, I., and Tanaka, S., 1992, In-situ optical monitoring of growth rate and surface roughness of YBa2Cu3O7−x films in chemical vapor deposition, Jpn. J. Appl. Phys., 31:L835.

    Article  Google Scholar 

  • Higashiyama, K., Ushida, T., Higa, H., Hirabayashi, I., and Tanaka, S., 1993, Growth mechanism of a-axis oriented YBa2Cu3O7−x thin film by laser-induced MOCVD, Physica C, 212:101.

    Article  Google Scholar 

  • Ichinose, A., Daniels, G., Yang, C.Y., Larbalestier, D., Kikuchi, A., Tachikawa, K., and Akita, S., 1999, Preparation and characterization of Y2O3 buffer layers and YBCO films on textured Ni tape, IEEE Trans. Appl. Supercond., 9:2280.

    Article  Google Scholar 

  • Iijima, Y., Tanabe, N., Kohono, O., and Okeno, Y., 1992, In-plane aligned YBa2Cu3O7−x thin films deposited on polycrystalline metallic substrates, Appl. Phys. Lett., 60:769.

    Article  Google Scholar 

  • Ignatiev, A., Zhong, Q., Chou, P.C., Zhang, X., Liu. J.R., and Chu, W.K., 1996, Large Jc enhancement by ion-irradiation for thick YBCO films prepared by photo-assisted MOCVD, Appl. Phys. Lett., 70:1474.

    Article  Google Scholar 

  • Ignatiev, A., Chou, P.C., Zhong, Q., Zhang, X., and Chen, Y.M., 1998a, Photo-assisted MOCVD growth of YBCO thick films for wire applications, Appl. Supercond., 4:455.

    Article  Google Scholar 

  • Ignatiev, A., Chou, P.C., Zhong, Q., Zhang, X., and Chen, Y.M., 1998b, Photo-assisted fabrication of YBCO thick films and buffer layers on flexible substrates for wire applications, Intl. J. Mod. Phys. B, 2:3162.

    Article  Google Scholar 

  • Ito, Y., Yoshida, Y., Iwata, M., Takai, Y., and Hirabayashi, I., 1997, Preparation of double-sided YBa2Cu3O7−x film by hot-wall type MOCVD, Physica C, 288:178.

    Article  Google Scholar 

  • Klippe, L. and Wahl, G., 1997, Single-source MOCVD of Y-, Ba-and Cu oxides from thd-precursors, J. Alloys and Compounds, 251:249.

    Article  Google Scholar 

  • Komatsu, Y., Sato, T., Ito, S., and Akashi, K., 1999a, Preparation of YBCO/ZrO2 thin films on Si by MOCVD using a mode converting type of microwave plasma apparatus, Thin Sol. Films, 341:132.

    Article  Google Scholar 

  • Komatsu, Y., Sato, T., Ito, S., and Akashi, K., 1999b, Preparation of YBCO /ZrO2 thin films on Si by MOCVD using a mode converting type of microwave plasma apparatus, Thin Sol. Films, 341:132.

    Article  Google Scholar 

  • Krellmann, M., Selbmann, D., Schmatz, U., and Weiss, F., 1997, YSZ buffer layers on technical substrates for HTSC current applications by AAMOCVD, J. Alloys and Compounds, 251:307.

    Article  Google Scholar 

  • Li, Y.Q., Zhao, J., Chern, C.S., Huang, W., Kulesha, G.A., Lu, P., Gallois, B., Norris, P., Kear, B., and Cosandey, F., 1991, High critical current densities in YBa2Cu3O7−x thin films formed by metalorganic chemical vapor deposition at 730°C, Appl. Phys. Lett., 58:648.

    Article  Google Scholar 

  • List, F.A., Goyal, A., Paranthaman, M., Norton, D.P., Specht, E.D., Lee, D.F., and Kroger, D.M., 1998, High Jc YBCO films on biaxially textured Ni with oside buffer layers deposited using electron beam evaporation and sputtering, Physica C, 302:87.

    Article  Google Scholar 

  • Lu, Z., Truman, J.K., Johnasson, M.E., Zhang, D., Shih, C.F., and Liang, G.C., 1995, Large area double-sided YBa2Cu3O7−x films grown by single-source metal organic chemical vapor deposition, Appl. Phys. Lett., 67:712.

    Article  Google Scholar 

  • Maraitakis, E., Anagnostou, M., Pissas, M., Psyharis, V., Niarchos, D., and Strantakos, G., 1998, Deposition of YBa2Cu3O7−x thin films over large areas with simple sputtering technique for microwave applications, Supercond. Sci. Technol., 11:686.

    Article  Google Scholar 

  • Marks, T.J., Belot, J.A., Reedy, C.J., McNeely, R.J., Strudebaker, D.B., Neumayer, D.A., and Stern, C.L., 1997, MOCVD precursor desing issuess. Recent advances in the chemistry and vapor pressure characteristics of Ba(hexafluoroacetylacetonate)2 •polyether complexes, J. Alloys and Compounds, 251:243.

    Article  Google Scholar 

  • Mizushima, Y. and Hirabayashi, I., 1994, Fabrication of YBa2Cu3O7−x film by laser chemical vapor deposition using Ba(hfa)2•tetraglyme, Physica C, 235:577.

    Article  Google Scholar 

  • Nagai, H., Yoshida, Y., Ito, Y., Taniguchi, S., Hirabayashi, I., Matsunami, N., and Takai, Y., 1997, Preparation of YBa2Cu3O7−x films by metal organic chemical vapor deposition using liquid-state non-fluorinated sources, Supercond. Sci. Technol., 10:213.

    Article  Google Scholar 

  • Noh, D.W., Gallois, B., Chern, C.S., Caracciolo, R., Kera, B.H., Zawadzki, P.A., Tompa, G.S., and Norris, P.E., 1989, Metalorganic chemical vapor deposition of superconducting YBa2Cu3O7−x in a high speed rotating disk reactor, J. Appl. Phys., 66:5099.

    Article  Google Scholar 

  • Norton, D.P., Goyal, A., Budai, J.D., Christen, D.K., Kroeger, D.M., Specht, E.D., He, Q., Saffian, B., Paranthaman, M., Klabunde, C.E., Lee, D.F., Sales, B.C., and List, F.A., 1996, Epitaxial YBa2Cu3O7−x on biaxially textured nickel (001): An approach to superconducting tapes with high critical current density, Science, 274:755.

    Article  Google Scholar 

  • Otway, D.J., Obi, B., and Rees, W.S., 1997, Precursors for chemical vapor deposition of YBCO, J. Alloys and Compounds, 252:254.

    Article  Google Scholar 

  • Panson, A.J., Charles, R.G., Schmidt, D.N., Szendon, J.R., Machiko, G.J., and Braginski, A.I., 1988, Chemical vapor deposition of YBa2Cu3O7−x using metalorganic chelate precursors, Appl. Phys. Lett., 53:1756.

    Article  Google Scholar 

  • Park, C., Norton, D.P., Christen, D.K., Verebelyi, D.T., Feentstra, R., Budai, J.D., Goyal, A., Lee, D.K., Specht, E.D., Kroger, D.M., and Paranthaman, M., 1999, Long length fabrication of YBCO on rolling assisted biaxially textured substrates (RABiTS) using pulsed laser deposition, Appl. Supercond., 9:2276.

    Article  Google Scholar 

  • Richards, B.C., Cook, S.L., Pinch, D.L., Andrews, G.W., Lengeling, G., Schulte, B., Jurgensen, H., Shen, Y.Q., Vase, P., Freltoft, T., Spee, C.I.M.A., Linden, J.L., Hitchman, M.L., Shamlian, S.H. and Brown, A., 1995a, MOCVD of high quality YBa2Cu3O7−x thin films using a fluorinated barium precursor, Physica C, 252:229.

    Article  Google Scholar 

  • Richards, B.C., Cook, S.L., Pinch, D.L., and Andrews, G.W., 1995b, MOCVD of high quality YBa2Cu3O7−x thin films using novel fluorinated and non-fluorinated precrusors, J. Physique, Colloque C5, 5:407.

    Google Scholar 

  • Ritums, D.L., Liu, D., Wu, N.J., Zhong, Q., Chen, Y.M., Zhang, X., Chou, P.C., and Ignatiev, A., 1996, Epitaxially deposited SrVO3 conducting films by laser ablation and MOCVD, in: Proc. of 10thIEEE Intl. Symp. on the Appl. Ferroelectrics, 96CH35948:417.

    Google Scholar 

  • Salazar, K.V., Ott, K.C., Dye, R.C., Hubbard, K.M., Peterson, E.J., and Coulter J.Y., 1992, Aerosol assisted chemical vapor deposition of superconducting YBa2Cu3O7−x, Physica C, 98:303.

    Article  Google Scholar 

  • Schulte, B., Maul, M., Becker, W., Schlosser, E.G., Elschner, S., Haussler, P., and Adrian, H., 1991, Carrier gas-free chemical vapor deposition technique for in situ preparation of high quality YBa2Cu3O7−x thin films, Appl. Phys. Lett., 59:869.

    Article  Google Scholar 

  • Senateur, J.P., Felten, F., Pignard, S., Weiss, F., Arbrutis, A., Bigelyte, V., Teiserskis, A., Saltyte, Z., and Vengalis, B., 1997, Synthesis and characterization of YBCO thin films grown by injection MOCVD, J. Alloys and Compounds, 251:288.

    Article  Google Scholar 

  • Stringfellow, G.B., 1989, Organometallic Vapor-Phase Epitaxy: Theory and Practice, Academic Press, San Diego.

    Google Scholar 

  • Sugimoto, T., Yoshida, M., Yamaguchi, K., Yamada, Y., Sugawara, K., Shiohara, Y., and Tanaka, S., 1991, Fabrication and characterization of Bi-Sr-Ca-Cu-O MOCVD thin films, J. Crystal Growth, 107:692.

    Article  Google Scholar 

  • Takahishi, N., Koukitu, A., and Seki, H., 2000, Growth and characterization of YBa2Cu3Ox and NdBa2Cu3Ox superconducting thin films by mist microwave-plasma chemical vapor deposition using a CeO2 buffer layer, J. Mater. Sci., 35:1231.

    Article  Google Scholar 

  • Tasaki, Y., Yoshizawa, S., and Satoh, M., 1998, New method to increase solid precursor vaporization for metalorganic chemical vapor deposition, Jpn. J. Appl. Phys., 37:649.

    Article  Google Scholar 

  • Thieme, C.L.H., Fleshier, S., Buczek, D.M., Jowett, M., Fritzmeier, L.G., Arendt, P.N., Foltyn, S.R., Coulter, J.Y., and Willis, J.O., 1999, Axial strain dependence at 77 K of the critical current of thick YBa2Cu3O7−x films on Ni-alloy substrtes with IBAD buffer layers, IEEE Trans. Appl. Supercond., 9:1494.

    Article  Google Scholar 

  • Tsuruoka, T., Kawasaki, R., and Abe, H., 1989, Y-Ba-Cu-O film growth by OMCVD using N2O, Jpn. J. Appl. Phys., 28:1800.

    Article  Google Scholar 

  • Ushida, T., Higa, H., Higashiyama, K., Hirabayashi, I., and Tanaka, S., 1991, Preparation of a-axis oriented YBa2Cu3O7−x films by laser metalorganic chemical vapor deposition, Appl. Phys. Lett., 59:860.

    Article  Google Scholar 

  • Watson, I.M., Atwood, M.P., and Haq, S., 1994, Investigation of barium β-diketonate complexes used in chemical vapor deposition of high Tc oxide films, Supercond. Sci. Technol., 7:672.

    Article  Google Scholar 

  • Weiss, F., Schmatz, U., Pish, A., Felten, F., Pignard, S., Senateur, J.P., Frolich, K., Seldmann, D., and Klippe, L., 1997, HTS films by innovative MOCVD processes, J. Alloys and Compounds, 251:264.

    Article  Google Scholar 

  • Wu, X.D., Dye, R.C., Meunchausen, R.E., Flotyn, S.R., Maley, M., Rollet, A.D., Garcia, A.R., and Nogar, N.S., 1991, Epitaxial CeO2 films as buffer layers for high temperature superconducting thin films, Appl. Phys. Lett., 58:2165.

    Article  Google Scholar 

  • Wu, X.D., Foltyn, S.R., Arendt, P.N., Blumenthal, W.R., Campbell, H., Cotton, J.D., Coulter, J.Y., Hults, W.L., Maley, M.P., Safar, H.F., and Smith, J.L., 1995, Properties of YBa2Cu3O7−x thick films on flexible buffered metallic substrates, Appl. Phys. Lett., 67:2397.

    Article  Google Scholar 

  • Yamane, H., Kurosawa, H., and Hirai, T., 1988, Preparation of YBa2Cu3O7−x films by chemical vapor deposition, Chem. Lett., 939.

    Google Scholar 

  • Yamane, H., Kurosawa, H., Hirai, T., Watanabe, K., Iwasaki, H., Kobayashi, N., and Muto, Y., 1989, High critical-current density of Y-Ba-Cu-O superconducting films prepared by CVD, Supercond. Sci. Technol., 2:115.

    Article  Google Scholar 

  • Yamasaki, H., Endo, K., Nakagawa, Y., Umeda, M., Kosaka, S., Misawa, S., Yoshida, S., and Kajimura, K., 1992, Critical current density of high quality Bi-Sr-Ca-Cu-O thin films prepared by metalorganic chemical vapor deposition, J. Appl. Phys., 72:2951.

    Article  Google Scholar 

  • Zama, H. and Oda, S., 1991, Low-temperature chemical vapor deposition of YBa2Cu3O7−x films, Physica C, 185:2103.

    Article  Google Scholar 

  • Zama, H., Miyake, T., Hattori, T., and Oda, S., 1992a, Preparation of YBCO superconducting films by lowtemperature chemical vapor deposition using β-diketonate complex and N2O, J. Appl. Phys., 31:3839.

    Google Scholar 

  • Zama, H., Sakai, K., and Oda, S., 1992b, In-situ monitoring of optical reflectance oscillation in layer-by-layer chemical vapor deposition of oxide superconductor films, Jpn. J. Appl. Phys., 31:L1243.

    Article  Google Scholar 

  • Zama, H., Tanaka, N., and Morishita, T., 1998, Evaluation of a new Ba precursor, Ba(DPM)2-2tetraen, for MOCVD of oxide superconductors, Mat. Sci. and Engineering, B54:104.

    Article  Google Scholar 

  • Zhang, K., Boyd, E.P., Kwak, B.S., Wright, A.C., and Erbil, A., 1989a, Metalorganic chemical vapor deposition of TlBaCaCuO superconducting thin films on sapphire, Appl. Phys. Lett., 55:1258.

    Article  Google Scholar 

  • Zhang, K., Kwak, B.S., Boyd, E.P., Wright, A.C., and Erbil, A., 1989b, C-axis oriented YBa2Cu3O7−x superconducting films by metalorganic chemical vapor deposition, Appl. Phys. Lett., 54:380.

    Article  Google Scholar 

  • Zhang, J.M., Wessels, B.W., Tonge, L.M., and Marks, T.J., 1990, Formation of oriented high Tc superconducting Bi-Sr-Ca-Cu-O thin films on silver substrates by organometallic chemical vapor deposition, Appl. Phys. Lett., 56:976.

    Article  Google Scholar 

  • Zhao, J., Li, Y.Q., Chern, C.S., Lu, P., Norris, P., Gallios, B., Kear, B., Cosandey, F., Wu, X.D., Muenchausen, R.E., and Garrison, S.M., 1991, High-quality YBa2Cu3O7−x thin films by plasma-enhanced metalorganic chemical vapor deposition at low temperatures, Appl. Phys. Lett., 59:1254.

    Article  Google Scholar 

  • Zhong, Q., 1996, High rate growth of YBCO films by photo-assisted metal organic chemical vapor deposition, Ph.D. thesis, University of Houston.

    Google Scholar 

  • Zhong, Q., Chou, P.C., Li, Q.L., Taraldsen, G.S., and Ignatiev, A., 1995, High-rate growth of purely a-axis oriented YBCO high-Tc thin films by photo-assisted MOCVD, Physica C, 246:288.

    Article  Google Scholar 

  • Zhou, G., Meng, G., Schnider, R., Sarma, B., and Levy, M., 1994, Vaporization of a mixed precursor in chemical vapor deposition of YBCO films, J. Superconductivity, 7:235.

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Space Vacuum Epitaxy Center and Texas Center for Superconductivity, University of Houston, Houston, TX, 77204-5507, USA

    Alex Ignatiev

Authors
  1. Alex Ignatiev
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Oak Ridge National Laboratory, Oak Ridge, Tennessee, USA

    Amit Goyal

Rights and permissions

Reprints and permissions

Copyright information

© 2005 Kluwer Academic Publishers

About this chapter

Cite this chapter

Ignatiev, A. (2005). MOCVD Growth of YBCO Films for Coated Conductor Applications. In: Goyal, A. (eds) Second-Generation HTS Conductors. Springer, Boston, MA. https://doi.org/10.1007/0-387-25839-6_15

Download citation

  • DOI: https://doi.org/10.1007/0-387-25839-6_15

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4020-8117-0

  • Online ISBN: 978-0-387-25839-3

  • eBook Packages: EngineeringEngineering (R0)

Publish with us

Policies and ethics

Search

Navigation