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MEMS/NEMS pp 1718–1745Cite as

Vertical Combdrive Actuator: Design and Fabrication for Micromirror Applications

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Abstract

This chapter will focus on the design of electrostatic actuators as critical elements in the design of dynamic elements in optical microsystems. Electrostatic actuators are typically preferred over other actuation mechanisms because they can be fabricated in established silicon IC processes, generate large forces and can be easily integrated with electronic components.

Chapter material drawn from: U. Krishnamoorthy, PhD thesis, 2002, UC Davis, CA, USA.

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  26. Copyright 2002 Elsevier Science, Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from Elsevier Ltd.

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  27. Copyright 2003 IEEE, Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from IEEE.

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  28. Copyright 2004 Elsevier Science, Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from Elsevier Ltd.

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Author information

Authors and Affiliations

  1. E.L. Ginzton Labs, Stanford University, USA

    Uma Krishnamoorthy, Daesung Lee & Olav Solgaard

Authors
  1. Uma Krishnamoorthy
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  2. Daesung Lee
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  3. Olav Solgaard
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Editor information

Editors and Affiliations

  1. University of California, Los Angeles, USA

    Cornelius T. Leondes

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Krishnamoorthy, U., Lee, D., Solgaard, O. (2006). Vertical Combdrive Actuator: Design and Fabrication for Micromirror Applications. In: Leondes, C.T. (eds) MEMS/NEMS. Springer, Boston, MA. https://doi.org/10.1007/0-387-25786-1_42

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