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Techniques in Proper Orthogonal Decomposition and Component Mode Synthesis for the Dynamic Simulation of Complex MEMS Devices and Their Applications

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MEMS/NEMS

Abstract

The modelling and simulation of microelectromechanical systems (MEMS) devices are usually described by coupled nonlinear partial differential equations (PDEs). Traditional fully meshed models, such as finite element method (FEM) or finite difference method (FDM), can be used for explicit dynamic simulations of nonlinear PDEs. However, time-dependent FEM or FDM is usually computationally very intensive and time consuming when a large number of simulations are needed, especially when multiple or structurally complex devices are present in the systems. In order to perform rapid design verification and optimisation of MEMS devices, it is essential to generate low-order dynamic models that permit fast simulation while capturing most of the accuracy and flexibility of the fully meshed model simulations. These low-order models, generated by making use of model order reduction techniques, are called reduced-order models or macromodels [1].

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Author information

Authors and Affiliations

  1. Institute of High Performance Computing, 1 Science Park Road, #01-01 The Capricorn Singapore Science Park II, Singapore, 117528

    W. Z. Lin & Y. C. Liang

  2. Department of Mechanical Engineering, National University of Singapore, 10 Kent Ridge Crescent, Singapore, 119260

    S. P. Lim

  3. College of Computer Science and Technology, Jilin University, 10 Qian Wei Road, Changchun, 130012, P.R. China

    Y. C. Liang

Authors
  1. W. Z. Lin
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  2. S. P. Lim
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  3. Y. C. Liang
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Editor information

Editors and Affiliations

  1. University of California, Los Angeles, USA

    Cornelius T. Leondes

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© 2006 Springer Science+Business Media, Inc.

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Lin, W.Z., Lim, S.P., Liang, Y.C. (2006). Techniques in Proper Orthogonal Decomposition and Component Mode Synthesis for the Dynamic Simulation of Complex MEMS Devices and Their Applications. In: Leondes, C.T. (eds) MEMS/NEMS. Springer, Boston, MA. https://doi.org/10.1007/0-387-25786-1_4

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