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Single-Crystal Silicon Based Electrothermal MEMS Mirrors for Biomedical Imaging Applications

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MEMS/NEMS

Abstract

Micromirrors have extensive applications in optical switches, displays and many other areas. This chapter is dedicated to introducing a new class of single-crystal silicon (SCS) based micromirrors for biomedical imaging applications particularly for optical coherence tomography (OCT). The SCS micromirrors include one-dimensional (1-D) and two-dimensional (2-D) scanning micromirrors and large-vertical-displacement (LVD) phase-only micromirrors. All the 1-D and 2-D micromirrors are 1 mm by 1 mm in size and coated with aluminum for high reflectivity in broad band. All the micromirrors have flat surface due to the thick SCS supporting layer. The measured static rotation angles are more than 30° at less than 15-V drive voltages, and the resonant frequencies are in order of 1 kHz. A large 200-µm static piston motion has been achieved with the LVD micromirror which has a size of only 0.7 mm by 0.32 mm. Design, simulation, modeling, fabrication and experimental results of these thermally-actuated devices are discussed in detail in this chapter. This first section will introduce the operation of OCT and various existing MEMS mirror techniques.

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Authors and Affiliations

  1. Department of Electrical and Computer Engineering, University of Florida, USA

    Huikai Xie, Shane Todd & Ankur Jain

  2. Department of Electrical and Computer Engineering, Carnegie Mellon University, USA

    Gary K. Fedder

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  1. Huikai Xie
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  2. Shane Todd
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  3. Ankur Jain
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  1. University of California, Los Angeles, USA

    Cornelius T. Leondes

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Xie, H., Todd, S., Jain, A., Fedder, G.K. (2006). Single-Crystal Silicon Based Electrothermal MEMS Mirrors for Biomedical Imaging Applications. In: Leondes, C.T. (eds) MEMS/NEMS. Springer, Boston, MA. https://doi.org/10.1007/0-387-25786-1_36

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