Abstract
As microfabrication technologies mature, the use of microsensors to detect acceleration, pressure, fluid flow and angular rate variation is becoming increasingly common. These sensors find widespread application in the chemical, electronic, automobile, and biomedical fields, and throughout the scientific community in general. Recent market studies have predicted an enormous surge in demand for these sensors in the coming years. In fact, estimates of microsensor market volumes predict worldwide sales of US$50 billion in 2008 (Intechno Consulting, 1999).
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Lee, CY., Lin, CH., Fu, LM. (2006). Techniques in MEMS Devices for Micro Humidity Sensors and Their Applications. In: Leondes, C.T. (eds) MEMS/NEMS. Springer, Boston, MA. https://doi.org/10.1007/0-387-25786-1_27
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