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MEMS/NEMS Techniques and Applications

Techniques and Applications of Capacitive Micromachined Ultrasonic Transducers

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MEMS/NEMS

Abstract

Ultrasound is an imaging tool with a broad range of applications such as medical diagnostics, underwater exploration and nondestructive evaluation of materials. As early as the first half of the 19th century, sound waves had been used for underwater navigation and ranging. However, the history of modern acoustics began with the establishment of the theory of sound by Lord Rayleigh, and the discovery of piezoelectric effect by the Curie brothers, both in the late 1800s. Acoustical devices have been used for practical underwater imaging applications since World War I. Use of ultrasound in medicine started in the 1930s, and initially was confined to therapy, particularly in tissue heating. The first use of ultrasound as a medical diagnostic tool was for transmission imaging of brain tumors in the early 1940s. In the following years, sonic energy reflection from within soft tissue histological elements was reported, pioneering pulse-echo ultrasound imaging. Linear transducer arrays with electronic scanning started replacing fixed-focus mechanical sector scanners in the 1970s, providing greatly improved resolution and faster image formation. The details of the history of ultrasound imaging and transducer technologies can be found in several books [1, 2] and papers [3]–[6].

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Authors and Affiliations

  1. E. L. Ginzton Laboratory, Stanford University, 94305-4088, Stanford

    A. S. Ergun, G. G. Yaralioglu, O. Oralkan & B. T. Khuri-Yakub

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  1. A. S. Ergun
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  2. G. G. Yaralioglu
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  3. O. Oralkan
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  4. B. T. Khuri-Yakub
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  1. University of California, Los Angeles, USA

    Cornelius T. Leondes

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Ergun, A.S., Yaralioglu, G.G., Oralkan, O., Khuri-Yakub, B.T. (2006). MEMS/NEMS Techniques and Applications. In: Leondes, C.T. (eds) MEMS/NEMS. Springer, Boston, MA. https://doi.org/10.1007/0-387-25786-1_16

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