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MEMS/NEMS pp 353–382Cite as

Fabrication Techniques in Micromachined Capacitive Ultrasonic Transducers and their Applications

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Abstract

Piezoelectric crystals, ceramics, polymers, and piezocomposite materials have long dominated the ultrasonic transducer technology, especially in medical ultrasound imaging. In recent years, thanks to the advances in microfabrication techniques, the technology of capacitive Micromachined Ultrasonic Transducers (CMUTs) has emerged as a competitive technology in the field of medical imaging.

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Author information

Authors and Affiliations

  1. Istituto di Fotonica e Nanotecnologie IFN-CNR, Via Cineto Romano 42, 00156, Roma, Italy

    Elena Cianci, Vittorio Foglietti & Antonio Minotti

  2. Dipartimento di Ingegneria Elettronica, Università Roma TRE, Via della Vasca Navale, 84, 00146, Roma, Italy

    Alessandro Caronti, Gino Caliano & Massimo Pappalardo

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  1. Elena Cianci
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  2. Vittorio Foglietti
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  3. Antonio Minotti
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  4. Alessandro Caronti
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  5. Gino Caliano
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  6. Massimo Pappalardo
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Editors and Affiliations

  1. University of California, Los Angeles, USA

    Cornelius T. Leondes

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Cianci, E., Foglietti, V., Minotti, A., Caronti, A., Caliano, G., Pappalardo, M. (2006). Fabrication Techniques in Micromachined Capacitive Ultrasonic Transducers and their Applications. In: Leondes, C.T. (eds) MEMS/NEMS. Springer, Boston, MA. https://doi.org/10.1007/0-387-25786-1_11

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