This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Wang, Y.H., et al., Fundamentals of Ion Implantation and Analysis (in Chinese, Aeronautical Industry Press, Beijing, 1992).
Zhang, G.H. and Zhong, S.L., Ion Implantation Technology (in Chinese, Engineering Industry Press, Beijing, 1982).
Nastasi, M., Mayer, J.W. and Hirvonen, J., Ion-Solid Interactions: Fundamentals and Applications (Cambridge University Press, Cambridge, 1996).
Benninghoven, A., Developments in Secondary Ion Mass Spectroscopy and Applications to Surface Studies, Surf. Sci., 53(1975)596.
Niehus, H., et al., Low-energy Ion Scattering at Surfaces, Surf. Sci. Rep, 7(1993)213.
Gerlach, R.L., in Electron Spectroscopy, ed.: Shirley D.A. (North Holland, Amsterdam, 1972).
Plog, C., et al, Surf. Sci., 67(1977)565.
Tolk, N.H., et al., Elastic Ion-Surface Collisions (Academic Press Inc., New York, 1977).
Fiermans, L., et al., Electron and Ion Spectroscopy of Solids (Plenum Press, New York, 1978).
Hagstrum, H.D., Phys. Rev. Lett., 43(1979)1050.
Behrisch, G., Sputtering by Particle Bombardment I and II (Springer Verlag, Heidelberg, 1983).
Yamamura, Y. and Tawara, H., Energy Dependence of Ion-Induced Sputtering Yields from Monoatomic Solids at Normal Incidence (Mar. 1995, NIFS Research Reports: DATA-23).
Lindhard, J., et al., Phys. Rev., 124(1961)128.
Sigmund, P., Phys. Rev., 184(1969)383.
Rol, P.K., et al., Physica, 26(1960)1009.
Czanderna, A.W., Methods of Surface Analysis (4th edition, North-Holland, Amsterdam, 1989).
Evans, R.D., The Atomic Nucleus (McGraw-Hill Inc., New York, 1955) Chapter 18–25.
Marmier, P. and Sheldon, E., Physics of Nuclei and Particles (Academic Press Inc., New York, 1969) Vol. 1, Chapter 4.
Fano, U., Ann. Rev. Nucl. Sci., 13(1963)1.
Northeliffe, L.C., Ann. Rev. Nucl. Sci., 13(1963)67.
Northeliffe, L.C. and Schilling, R.F., Nuclear Data Table, A 7(1970) 233.
SRIM 2003. http://www.srim.org/.
Ziegler, J.F., Biersack, J.P. and Littmark, U., The Stopping and Range of Ions in Matter (Pergamon Press, New York, 1985).
Ziegler, J.F. and Manoyan, J.M., The Stopping of Ions in Compounds, Nucl. Instr. Meth., B35(1988)215–228.
Anderson, H.H. and Ziegler, J.F., Hydrogen Stopping Powers and Ranges in All Elements (Pergamon Press Inc., New York, 1977).
Ziegler, J.F., Helium Stopping Powers and Ranges in All Elemental Matter (Pergamon Press Inc, New York, 1977).
Huang, W.D., A Study of Mechanisms Involved in the Interactions between Low-energy Ions and Biological Molecules (in Chinese, Ph.D. dissertation, Institute of Plasma Physics, Chinese Academy of Sciences, 1995).
Further Reading
Wang, Y.H., et al., Fundamentals of Ion Implantation and Analysis (in Chinese, Aeronautical Industry Press, Beijing, 1992).
Zhang, G.H. and Zhong, S.L., Ion Implantation Technology (in Chinese, Engineering Industry Press, Beijing, 1982).
Nastasi, M., Mayer, J.W. and Hirvonen, J., Ion-Solid Interactions: Fundamentals and Applications (Cambridge University Press, Cambridge, 1996).
Gras-Marti, Alberto, Interaction of Charged Particles With Solids and Surfaces (Kluwer Academic Pub., New York, 1991).
Gibson, W.M., Ion-Solid Interactions (Institution of Electrical Engineers, London, 1980).
Rights and permissions
Copyright information
© 2006 Springer Science+Business Media, Inc.
About this chapter
Cite this chapter
(2006). Fundamentals of Ion Implantation. In: Introduction to Ion Beam Biotechnology. Springer, Boston, MA. https://doi.org/10.1007/0-387-25586-9_3
Download citation
DOI: https://doi.org/10.1007/0-387-25586-9_3
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-387-25531-6
Online ISBN: 978-0-387-25586-6
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)