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Fundamentals of Ion Implantation

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Keywords

Nuclear Reaction Target Material Target Atom Secondary Electron Emission Collision Cascade 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

References

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    Nastasi, M., Mayer, J.W. and Hirvonen, J., Ion-Solid Interactions: Fundamentals and Applications (Cambridge University Press, Cambridge, 1996).Google Scholar
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Further Reading

  1. 1.
    Wang, Y.H., et al., Fundamentals of Ion Implantation and Analysis (in Chinese, Aeronautical Industry Press, Beijing, 1992).Google Scholar
  2. 2.
    Zhang, G.H. and Zhong, S.L., Ion Implantation Technology (in Chinese, Engineering Industry Press, Beijing, 1982).Google Scholar
  3. 3.
    Nastasi, M., Mayer, J.W. and Hirvonen, J., Ion-Solid Interactions: Fundamentals and Applications (Cambridge University Press, Cambridge, 1996).Google Scholar
  4. 4.
    Gras-Marti, Alberto, Interaction of Charged Particles With Solids and Surfaces (Kluwer Academic Pub., New York, 1991).Google Scholar
  5. 5.
    Gibson, W.M., Ion-Solid Interactions (Institution of Electrical Engineers, London, 1980).Google Scholar

Copyright information

© Springer Science+Business Media, Inc. 2006

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