Porous Silicon for Micromachining
Porous silicon was first observed during electropolishing when the current density was too low for a given HF concentration. Interest was evoked in the early 1990s with the discovery of photoluminescence and the potential for micromachining. Since these early investigations, both macroporous and microporous silicon have been shown to be valuable tools for micromachining.
KeywordsPorous Silicon Etch Rate Porous Formation Electrochemical Etching Sensor Actuator
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