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Electroceramic-Based MEMS pp 157–174Cite as

MEMS for Optical Functionality

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Author information

Authors and Affiliations

  1. Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA

    S.-G. Kim & G. Barbastathis

  2. Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA

    H. L. Tuller

  3. Microsystems Technology Laboratories, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA

    S.-G. Kim, G. Barbastathis & H. L. Tuller

Authors
  1. S.-G. Kim
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  2. G. Barbastathis
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  3. H. L. Tuller
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Editor information

Editors and Affiliations

  1. EPFL, Swiss Federal Institute of Technology, Switzerland

    Nava Setter

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© 2005 Springer Science+Business Media, Inc.

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Kim, SG., Barbastathis, G., Tuller, H.L. (2005). MEMS for Optical Functionality. In: Setter, N. (eds) Electroceramic-Based MEMS. Electronic Materials: Science and Technology, vol 9. Springer, Boston, MA. https://doi.org/10.1007/0-387-23319-9_8

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