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High Frequency Tuneable Devices Based on Thin Ferroelectric Films

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Electroceramic-Based MEMS

Part of the book series: Electronic Materials: Science and Technology ((EMST,volume 9))

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Authors and Affiliations

  1. Department of Microtechnology and Nanoscience, Chalmers University of Technology, 412 96, Gothenburg, Sweden

    S. Gevorgian

  2. Ericsson AB, Microwave and High Speed Electronics Research Centre, 431 84, Moelndal, Sweden

    S. Gevorgian

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  1. S. Gevorgian
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  1. EPFL, Swiss Federal Institute of Technology, Switzerland

    Nava Setter

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Gevorgian, S. (2005). High Frequency Tuneable Devices Based on Thin Ferroelectric Films. In: Setter, N. (eds) Electroceramic-Based MEMS. Electronic Materials: Science and Technology, vol 9. Springer, Boston, MA. https://doi.org/10.1007/0-387-23319-9_7

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