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RF Bulk Acoustic Wave Resonators and Filters

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Electroceramic-Based MEMS

Part of the book series: Electronic Materials: Science and Technology ((EMST,volume 9))

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Author information

Authors and Affiliations

  1. Philips Research Laboratories, Weisshausstr.2, D-52066, Aachen, Germany

    H.P. Loebl & C. Metzmacher

  2. Philips Research Laboratories, Cross Oak Lane, Redhill; Surrey, RH1 5HA, UK

    R.F. Milsom

  3. Philips Semiconductors, BL RF products, Gerstweg2, NL-6534, AE Nijmegen, The Netherlands

    P. Lok & A. Tuinhout

Authors
  1. H.P. Loebl
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  2. C. Metzmacher
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  3. R.F. Milsom
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  4. P. Lok
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  5. A. Tuinhout
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Editor information

Editors and Affiliations

  1. EPFL, Swiss Federal Institute of Technology, Switzerland

    Nava Setter

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© 2005 Springer Science+Business Media, Inc.

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Loebl, H., Metzmacher, C., Milsom, R., Lok, P., Tuinhout, A. (2005). RF Bulk Acoustic Wave Resonators and Filters. In: Setter, N. (eds) Electroceramic-Based MEMS. Electronic Materials: Science and Technology, vol 9. Springer, Boston, MA. https://doi.org/10.1007/0-387-23319-9_6

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