Skip to main content
SpringerLink
Log in
Book cover

Electroceramic-Based MEMS pp 37–48Cite as

Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films

  • Chapter

Part of the book series: Electronic Materials: Science and Technology ((EMST,volume 9))

This is a preview of subscription content, log in via an institution.

Chapter
USD   29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD   169.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD   219.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD   219.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Learn about institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. J.C. Bamber and M. Tristam, Diagnostic Ultrasound, in The physics of medical imaging, S. Webb, Editor. 1988, Adam Hilger: Bristol. p. 319–388.

    Google Scholar 

  2. J.L. Vernet, W. Steichen, R. Lardat, O. Garcia, and J.F Gelly. PMUTs design optimization for medical probes applications. in IEEEE Ultrasonic Symposium. 2001. Atlanta (USA): IEEE.

    Google Scholar 

  3. V. Mecea, Tunable gas sensors, Sensors and Actuators B 15–16, 265–269 (1993)

    Google Scholar 

  4. P. Muralt, M. Kohli, T. Maeder, A. Kholkin, K.G. Brooks, N. Setter, et al., Fabrication and characterization of PZT thin-film vibrators for micromotors, Sensors and Actuators A 48, 157–165 (1995)

    Google Scholar 

  5. G. Percin, T.S. Lundgren, and B.T. Khuri-Yakub, Controlled ink-jet printing and deposition of organic polymers and solid particles, Appl.Phys.Lett. 73, 2375–2377 (1998)

    Google Scholar 

  6. M.I. Haller and B.T. Khuri-Jakub. A surface micromachined electrostatic ultrasonic air transducer. in IEEE Ultrasonic Symposium. 1994.

    Google Scholar 

  7. M.I. Haller and B.T. Khuri-Jakub, A surface micromachined ultrasonic air transducer, IEEE Trans. UFFC 43, 1–6 (1996)

    Google Scholar 

  8. H.T. Soh, I. Ladabaum, A. Atalar, C.F. Quate, and B.T. Khuri-Jakub, Silicon micromachined ultrasonic immersion transducer, Appl.Phys.Lett. 69, 3674–3676 (1996)

    Google Scholar 

  9. J.J. Bernstein, S.L. Finberg, K. Houston, L.C. Niles, H.D. Chen, L.E. Cross, et al., Micromachined high frequency ferroelectric sonar transducers, IEEE Trans. UFFC 44, 960–969 (1997)

    Google Scholar 

  10. O. Oralkan, X. Jin, L. Degertekin, and P. Khuri-Yakub, Simulation and experimental characterization of a 2D capacitive micromachined ultrasonic transducer element, IEEE Trans. UFFC 46, (1999)

    Google Scholar 

  11. P.C. Eccardt and K. Niederer, Micromachined Ultrasonic Transducers with improved coupling factors from a CMOS compatible process, Ultrasonics 38, 774–780 (2000)

    Google Scholar 

  12. R. Farlow, W. Galbraith, M. Knowless, and G. Heyward, Micromachining of piezocomposite transducer using copper vapor laser, IEEE Trans. UFFC 48, 639–640 (2001)

    Google Scholar 

  13. S.J. Ok, C.H. Kim, and D.F. Baldwin, High density, high aspect ratio through-wafer electrical interconnect vias for MEMS packaging, IEEE Trans. Adv. Packaging 26, 302–309 (2003)

    Google Scholar 

  14. X.G. Li, T. Abe, X.Y. Liu, and M. Esashi, Fabrication of high density electrical feed-throughs by deep reactive ion etching pf Pyrex glass, J.Microelectromech.Systems 11, 625–630 (2002)

    Google Scholar 

  15. C.M. Hanson, Hybrid Pyroelectric-Ferroelectric Bolometer Arrays, Semiconductors and Semimetals 47, 123–174 (1997)

    Google Scholar 

  16. A.S. Ergun, G.G. Yaralioglu, and B.T. Khuri-Yakub, Capacitive Micromachined Ultrasonic Transducers: Theory and Technology, J. Aerospace Eng. April 2003, 76–84 (2003)

    Google Scholar 

  17. J. Johnson, O. Oralkan, U. Demirci, S. Ergun, M. Karaman, and P Khuri-Yakub, Medical imaging using capacitive micromachined ultrasonic trandsducer arrays, Ultrasonics 40, 471–476 (2002)

    Google Scholar 

  18. G.G. Yaralioglu, A.S. Ergun, B. Bayram, E. Haeggstrom, and B.T. Khuri-Jakub, Calculation and measurements of electromechanical coupling coefficients of capacitive micromachined ultrasonic transducers, IEEE Trans. UFFC 50, 449–456 (2003)

    Google Scholar 

  19. F.V. Hunt, Electroacoustics; the analysis of transduction and its historical background. 2nd ed. ed. 1982, Cambridge MA: Harvard University Press.

    Google Scholar 

  20. P. Muralt, Piezoelectric thin films for MEMS, Integrated Ferroelectrics 17, 297–307 (1997)

    Google Scholar 

  21. M.-A. Dubois and P. Muralt, Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and PZT thin films, Sensors and Actuators A 77, 106–112 (1999)

    Google Scholar 

  22. J.F. Shepard, P.J. Moses, and S. Trolier-McKinstry, The wafer flexure technique for the determination of the transverse piezoelectric coefficient (d31) of PZT thin films, Sensors and Actuators A 71, 133–138 (1998)

    Google Scholar 

  23. N. Ledermann, P. Muralt, J. Baborowski, S. Gentil, K. Mukati, M. Cantoni, et al., {100}-textured, piezoelectric Pb(Zrx, Til-x)O3 thin films for MEMS: integration, deposition and properties, Sensors and Actuators A 105, 162–170 (2003)

    Google Scholar 

  24. A.M. Flynn, L.S. Tavrow, S.F. Bart, R.A. Brooks, D.J. Ehrlich, K.R. Udajakumar, et al., Piezoelectric micromotors for microrobots, J. Microelectromechanical Systems 1, 44–51 (1992)

    Google Scholar 

  25. G. Percin and B.T. Khuri-Yakub, Piezoelectrically actuated flextensional micromachined ultrasound transducers—I. Theory, IEEE Trans. UFFC 49, 573–583 (2002)

    Google Scholar 

  26. G. Percin, Plate equations for piezoelectrically actuated flexural mode ultrasound transducers, IEEE Trans. UFFC 50, 81–88 (2003)

    Google Scholar 

  27. P. Muralt, A. Kholkin, M. Kohli, and T. Maeder, Piezoelectric actuation of PZT thin film diaphragms at static and resonant conditions, Sensors and Actuators A 53, 397–403 (1996)

    Google Scholar 

  28. M.-A. Dubois and P Muralt, PZT thin film actuated elastic fin micromotor, IEEE Trans. Ultrasonics, Ferroelectrics, and Frequency Control 45, 1169–1177 (1998)

    Google Scholar 

  29. I. Szabo, Höhere Technische Mechanilk. 1956, Berlin, Göttingen, Heidelberg: Springer.

    Google Scholar 

  30. J. Söderquist, Similarities between piezoelectric, thermal and other internal means of excitation vibrations, J.Micromech.Microeng. 3, 24–31 (1993)

    Google Scholar 

  31. J. Baborowski, Microfabrication of piezoelectric MEMS, J.Electroceramics (2003)

    Google Scholar 

  32. P. Muralt, D. Schmitt, N. Ledermann, J. Baborowski, P.K. Weber, W. Steichen, et al. Studyof PZT Coated Membrane Structures for Micromachined Ultrasonic Transducers. in IEEE Ultrasonic Symposium. 2001. Atlanta (USA).

    Google Scholar 

  33. J. Baborowski, N. Ledermann, and P. Muralt. Piezoelectric Micromachined Ultrasonic Transducers based on PZT thin films. in IEEE Ultrasonic Symposium. 2002. Munich (Germany).

    Google Scholar 

  34. D. Royer and E. Dieulesaint, Ondes elastiques dans les solides. Vol. 1. 1996, Paris: Masson.

    Google Scholar 

  35. H. Lamb, On the vibration of an elastic plate in contact with water, Proc.Royal Soc.London A 98, 205–216 (1920)

    Google Scholar 

  36. J. Baborowski, N. Ledermann, P. Muralt, and D. Schmitt, Simulation and characterization of piezoelectric micromachined ultrasonic transducers (pMUT’s) based on PZT/SOI membranes, Int. J. Comp. Eng. Sci. 4, 471–475 (2003)

    Google Scholar 

  37. S. Troyler-McKinstrey and P. Muralt, see Chapter 10, this book, (2005)

    Google Scholar 

  38. J.F. Gelly, F Lanteri, and S. Ballandras. MUT: Benchmarking with State of the Art Transducers for Medical Imaging Purpose. in 3rd MUT workshop. 2003. Lausanne.

    Google Scholar 

  39. K. Yamshita, H. Katata, M. Okuyama, H. Miyoshi, G. Kato, S. Aoyagi, et al., Arrayed ultrasonic microsensors with high directivity for in-air use using PZT thin film on silicon diaphragms, Sensors and Actuators A 97–98, 302–307 (2002)

    Google Scholar 

  40. G. Percin and B.T. Khuri-Yakub, Micromachined droplet ejector arrays for controlled ink-jet printing and deposition, Rev. Sci. Instr 73, 2193–2196 (2002)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Ceramics Laboratory, Swiss Federal Institute of Technology EPFL, CH-1015, Lausanne, Switzerland

    P. Muralt

Authors
  1. P. Muralt
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. EPFL, Swiss Federal Institute of Technology, Switzerland

    Nava Setter

Rights and permissions

Reprints and permissions

Copyright information

© 2005 Springer Science+Business Media, Inc.

About this chapter

Cite this chapter

Muralt, P. (2005). Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films. In: Setter, N. (eds) Electroceramic-Based MEMS. Electronic Materials: Science and Technology, vol 9. Springer, Boston, MA. https://doi.org/10.1007/0-387-23319-9_3

Download citation

Publish with us

Policies and ethics

Search

Navigation