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References
C.R. Martin and I.A. Aksay, J. Electroceramics 12, 53 (2004).
S.A. Campbell, The Science and Engineering of Microelectronic Fabrication (Oxford University Press, New York, 1996).
T. Ito and S. Okazaki, Nature 406, 1027 (2000).
C. Hageleitner, A. Hierlemann, D. Lange, A. Kummer, N. Kerness, O. Brand, and H. Baltes, Nature 414, 293 (2001).
D.L. Polla and L.F. Francis, Annu. Rev. Mater. Sci. 28, 563 (1998).
S. Ono and S. Hirano, J. Am. Ceram. Soc. 80, 2533 (1997).
N. Ozawa and T. Yao, Solid State lonics 151, 79 (2002).
K. Nashimoto, K. Haga, M. Watanabe, S. Nakamura, and E. Osakabe, Appl. Phys. Lett. 75, 1054 (1999).
J.F. Scott and C.A. Paz de Araujo, Science 246, 1400 (1989).
D.A. Payne and P.G. Clem, J. Electroceram. 3, 163 (1999).
Y. Xia and G.M. Whitesides, Annu. Rev. Mater. Sci. 28, 153 (1998).
A. Roelofs, T. Schneller, K. Szot, and R. Waser, Appl. Phys. Lett. 81, 5231 (2002).
S. Bühlmann, B. Dwir, J. Baborowski, and P. Muralt, Appl. Phys. Lett 80, 3195 (2002).
F.F. Lange, Science 273, 903 (1996).
R.W. Schwartz, Chem. Mater 9, 2325 (1997).
P.F. Blazdell, J.R.G. Evans, M.J. Edirisinghe, P. Shaw, and M.J. Binstead, J. Mater Sci. Lett. 14, 1562 (1995).
M. Mott, J.-H. Song, and J.R.G. Evans, J. Am. Ceram. Soc. 82, 1653 (1999).
P. Calvert, Chem. Mater. 13, 3299 (2001).
X.-M. Zhao, Y Xia, and G.M. Whitesides, J. Mater. Chem. 7, 1069 (1997).
T.W. Odom, J.C. Love, D.B. Wolfe, K.E. Paul, and G.M. Whitesides, Langmuir 18, 5314 (2002).
A. Folch and M.A. Schmidt, J. Microelectromech. S. 8, 85 (1999).
C.R. Martin and I.A. Aksay, submitted.
X.M. Zhao, Y.N. Xia, and G.M. Whitesides, Adv. Mater. 8, 837 (1996).
E. Kim, Y Xia, and G.M. Whitesides, Nature 376, 581 (1995).
Y. Xia, E. Kim, and G.M. Whitesides, Chem. Mater. 8, 1558 (1996).
E. Kim, Y. Xia, and G.M. Whitesides, J. Am. Chem. Soc. 118, 5722 (1996).
J.H. Kim, F.F. Lange, and C.-I. Choen, J. Mater Res. 14, 1194 (1999).
P.M. Moran and F.F. Lange, Appl. Phys. Lett. 74, 1332 (1999).
U.P. Schönholzer, N. Stutzmann, T.A. Tervoort, P. Smith, and L.J. Gauckler, J. Am. Ceram. Soc. 85, 1885 (2002).
U.P Schönholzer and L.J. Gauckler, Adv. Mater. 11, 630 (1999).
B. Su, D. Zhang, and T.W. Button, J. Mater. Sci. 37, 3123 (2002).
D. Zhang, B. Su, and T.W. Button, Adv. Eng. Mater. 5, 924 (2003).
E. Kim and G.M. Whitesides, J. Phys. Chem. B 101, 855 (1997).
N.L. Jeon, I.S. Choi, B. Xu, and G.M. Whitesides, Adv. Mater. 11, 946 (1999).
G. Yi, Z. Wu, and M. Sayer, J. Appl. Phys. 64, 2717 (1988).
J.S. Vartuli, M. Özenbaş, C.-M. Chun, M. Trau, and I.A. Aksay, J. Mater Res., 18, 1259 (2003).
C.R. Martin and I.A. Aksay, J. Phys. Chem. B., 107, 4261 (2003).
W.S. Beh, Y. Xia, and D. Qin, J. Mater. Res. 14, 3995 (1999).
S. Seraji, Y. Wu, N.E. Jewell-Larson, M.J. Forbess, S.J. Limmer, T.P Chou, and G. Cao, Adv. Mater. 12, 1421 (2000).
M. Trau, N. Yao, E. Kim, Y. Xia, G.M. Whitesides, and I.A. Aksay, Nature 390, 674 (1997).
A.Y. Ku, doctoral dissertation, Princeton University, 2004.
P. Yang, T. Deng, D. Zhao, P. Feng, D. Pine, B.F. Chmelka, G.M. Whitesides, and G.D. Stucky, Science 282, 2244 (1998).
M. Yu, J. Lin, Z. Wang, J. Fu, S. Wang, H.J. Zhang, and Y.C. Han, Chem. Mater. 14, 2224 (2002); M. Yu, J. Lin, and Y.C. Han, Chem. Phys. Lett. 371, 178 (2003); M. Yu, J. Lin, J. Fu, H.J. Zhang, and Y.C. Han, J. Mater Chem. 13, 1413 (2003); M.L. Pang, J. Lin, Z.Y. Cheng, J. Fu, R.B. Xing, and S.B. Wang, Mater Sci. Eng. B100, 124 (2003); X.M. Han, J. Lin, R.B. Xing, J. Fu, S.B. Wang, and Y.C. Han, J. Phys.: Condens. Matter 15, 2115 (2003); X.M. Han, J. Lin, J. Fu, R.B. Xing, M. Yu, Y.H. Zhou, M.L. Pang, Solid State Sci. 6, 349 (2004).
Z.Y. Cheng, Z. Wang, R.B. Xing, Y.C. Han, and J. Lin, Chem. Phys. Lett. 376, 481 (2003).
X.M. Han, J. Lin, R.B. Xing, J. Fu, and S.B. Wang, Mater. Lett. 57, 1355 (2003).
M. Heule and L.J. Gauckler, Adv. Mater. 13, 1790 (2001).
M. Heule and L.J. Gauckler, Sens. Actuators B 93, 100 (2003).
C.A. Bulthaup, E.J. Wilhelm, B.N. Hubert, B.A. Ridley, and J.M. Jacobson, Appl. Phys. Lett. 79, 1525 (2001).
S.Y. Chou, P.R. Krauss, and P.J. Renstrom, Science 272, 85 (1996).
S.Y Chou, P.R. Krauss, W. Zhang, L. Guo, and L. Zhuang, J. Vac. Sci. Technol. B 15, 2897 (1997).
C. Marzolin, S.P. Smith, M. Prentiss, and G.M. Whitesides, Adv. Mater. 10, 571 (1998).
E. Delamarche, H. Schmid, H.A. Biebuyck, and B. Michel, Adv. Mater 9, 741 (1997).
C. Harnagea, M. Alexe, J. Schilling, J. Choi, R.B. Wehrspohn, D. Hesse, and U. Gösele, Appl. Phys. Lett. 83, 1827 (2003).
O.J.A. Schueller, G.M. Whitesides, J.A. Rogers, M. Meier, and A. Dodabalapur, Appl. Optics 38, 5799 (1999).
A. Matsuda, Y. Matsuno, M. Tatsumisago, and T. Minami, J. Am. Ceram. Soc. 81, 2849 (1998).
S. Petronis, K.-L. Eckert, J. Gold, and E. Wintermantel, J. Mater Sci.-Mater Med. 12, 523 (2001).
B. Su, T.W. Button, A. Schneider, L. Singleton, and P. Prewett, Microsyst. Technol. 8, 359 (2002).
A. Schneider, B. Su, T.W. Button, L. Singleton, O. Wilhelmi, S.E. Huq, P.D. Prewett, and R.A. Lawes, Microsyst. Technol. 8, 88 (2002).
U.P. Schönholzer, R. Hummel, and L.J. Gauckler, Adv. Mater. 12, 1261 (2000).
T. Ohishi, S. Maekawa, and A. Katoh, J. Non-Cryst. Solids 147/148, 493 (1992).
K. Shinmou, N. Tohge, and T. Minami, Jpn. J. Appl. Phys. 33, Ll181 (1994).
T. Yogo, Y. Takeichi, K. Kikuta, and S.-I. Hirano, J. Am. Ceram. Soc. 78, 1649 (1995).
K. Kikuta, K. Takagi, and S. Hirano, J. Am. Ceram. Soc. 82, 1569 (1999).
K. Kikuta, K. Suzumori, K. Takagi, and S. Hirano, J. Am. Ceram. Soc. 82, 2263 (1999).
C. Marzolin, A. Terfort, J. Tien, and G.M. Whitesides, Thin Solid Films 315, 9 (1998).
Y. Nakao, T. Nakamura, K. Hoshiba, K. Sameshima, A. Kamisawa, K. Abe, N. Soyama, and K. Ogi, Jpn. J. Appl. Phys. 32, 4141 (1993).
A.H. Kärkkäinen, J.T. Rantala, A. Maaninen, G.E. Jabbour, and M.R. Descour, Adv. Mater. 14, 535 (2002).
A.H. Kärkkäinen, J.T. Rantala, J.M. Tamkin, and M.R. Descour, J. Lightwave Technol. 21, 614 (2003).
C. Lu, N. Wu, F Wei, X. Zhao, X. Jiao, J. Xu, C. Luo, and W. Cao, Adv. Funct. Mater. 13, 548 (2003).
J.V. Mantese, A.B. Catalan, A.M. Mance, A.H. Hamdi, A.L. Micheli, J.A. Sell, and M.S. Meyer, Appl. Phys. Lett. 53, 1335 (1988).
T. Toshiyuki, N. Ichinose, S. Kawanishi, M. Nishii, T. Sasuga, I. Hashida, and K. Mizuno, Chem. Mater. 9, 2674 (1997).
L.S. Hung and L.R. Zheng, Appl. Phys. Lett. 60, 2210 (1992).
S. Okamura, Y. Yagi, S. Ando, T. Tsukamoto, and K. Mori, Jpn. J. Appl. Phys. 33, 6579 (1996).
A. Kakimi, S. Okamura, Y. Yagi, K. Mori, and T. Tsukamoto, Jpn. J. Appl. Phys. 33, 5301 (1994).
K. Mori and S. Okamura, Jpn. J. Appl. Phys. 31, L1143 (1992).
A. Kumar and G.M. Whitesides, Appl. Phys. Lett. 63, 2002 (1993).
A. Kumar, H.A. Biebuyck, and G.M. Whitesides, Langmuir 10, 1498 (1994).
N.L. Jeon, P.G. Clem, R.G. Nuzzo, and D.A. Payne, J. Mater. Res. 10, 2996 (1995).
P.G. Clem, N.-L. Jeon, R.G. Nuzzo, and D.A. Payne, J. Am. Ceram. Soc. 80, 2821 (1997).
A.A. Darhuber, S.M. Troian, J.M. Davis, S.M. Miller, S. Wagner, J. Appl. Phys. 88, 5119 (2000).
N.L. Jeon, P. Clem, D.Y. Jung, W. Lin, G.S. Girolami, D.A. Payne, and R.G. Nuzzo, Adv. Mater. 9, 891 (1997).
Y.K. Hwang, S.Y. Woo, J.H. Lee, D.-Y. Jung, and Y.-U. Kwon, Chem. Mater. 12, 2059 (2000).
H. Shin, J.U. Jeon, Y.E. Pak, H. Im, and E.S. Kim, J. Mater Res. 16, 564 (2001).
M. Bartz, A. Terfort, W. Knoll, and W. Tremel, Chem. Eur J. 6, 4149 (2000).
M. Yan, Y. Koide, J.R. Babcock, P.R. Markworth, J.A. Belot, T.J. Marks, and R.P.H. Chang, Appl. Phys. Lett. 79, 1709 (2001).
C. Bechinger, H. Muffler, C. Schäfle, O. Sundberg, and P. Leiderer, Thin Solid Films 366, 135 (2000).
R.J. Collins, H. Shin, M.R. DeGuire, A.H. Heuer, and C.N. Sukenik, Appl. Phys. Lett. 69, 860 (1996).
K. Koumoto, S. Seo, T. Sugiyama, W.S. Seo, and W.J. Dressick, Chem. Mater. 11, 2305 (1999).
N. Saito, H. Haneda, W.-S. Seo, and K. Koumoto, Langmuir 17, 1461 (2001).
N. Saito, H. Haneda, T. Sekiguchi, N. Ohashi, I. Sakaguchi, and K. Koumoto, Adv. Mater. 14, 418 (2002).
N. Shirahata, Y. Masuda, T. Yonezawa, and K. Koumoto, Langmuir 18, 10379 (2002).
Y. Masuda, W.S. Seo, K. Koumoto, Jpn. J. Appl. Phys. 39, 4596 (2000).
H. Shin, Y. Wang, U. Sampathkumaran, M.R. DeGuire, A.H. Heuer, and C.N. Sukenik, J. Mater. Res. 14, 2116 (1999).
P.C. Hidber, W. Helbig, E. Kim, and G.M. Whitesides, Langmuir 12, 1375 (1996).
M. Wang, H.-G. Braun, T. Kratzmüller, and E. Meyer, Adv. Mater. 13, 1312 (2001).
S.M. Miller, S.M. Troian, and S. Wagner, J. Vac. Sci. Technol. B 20, 2320 (2002).
M. Wang, H.-G. Braun, and E. Meyer, Chem. Mater. 14, 4812 (2002).
J.W. Hutchinson and Z. Suo, Adv. Appl. Mech. 29, 63 (1992).
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Martin, C.R., Aksay, I.A. (2005). Low-Cost Patterning of Ceramic Thin Films. In: Setter, N. (eds) Electroceramic-Based MEMS. Electronic Materials: Science and Technology, vol 9. Springer, Boston, MA. https://doi.org/10.1007/0-387-23319-9_15
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