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Auciello, O. et al. (2005). Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices. In: Setter, N. (eds) Electroceramic-Based MEMS. Electronic Materials: Science and Technology, vol 9. Springer, Boston, MA. https://doi.org/10.1007/0-387-23319-9_11
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