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FIB for Materials Science Applications - a Review

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Book cover Introduction to Focused Ion Beams

Abstract

The application of focused ion beam techniques to a range of topics in materials science is reviewed. Recent examples in the literature are cited along with illustrations of numerous applications. Potential artifacts that can arise are discussed along with commentary on minimizing their impact.

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Authors and Affiliations

  1. Fibics Incorporated, 556 Booth St., Suite 200, Ottawa, Ontario, Canada

    M. W. Phaneuf

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  1. M. W. Phaneuf
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Editors and Affiliations

  1. FEI Company, Hillsboro, USA

    Lucille A. Giannuzzi

  2. North Carolina State University, Raleigh, USA

    Fred A. Stevie

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Phaneuf, M.W. (2005). FIB for Materials Science Applications - a Review. In: Giannuzzi, L.A., Stevie, F.A. (eds) Introduction to Focused Ion Beams. Springer, Boston, MA. https://doi.org/10.1007/0-387-23313-X_8

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