Abstract
Creating nanometer scale structures using a FIB has been a topic of recent interest. In this chapter we report on complicated nanometer level structures, such as a nano-wine glass and a nano-toilet, based on CAD data produced by the FIB CVD process.
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© 2005 Springer Science+Business Media, Inc.
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Kaito, T. (2005). Three-Dimensional Nanofabrication Using Focused Ion Beams. In: Giannuzzi, L.A., Stevie, F.A. (eds) Introduction to Focused Ion Beams. Springer, Boston, MA. https://doi.org/10.1007/0-387-23313-X_4
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DOI: https://doi.org/10.1007/0-387-23313-X_4
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-387-23116-7
Online ISBN: 978-0-387-23313-0
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