Abstract
The dual beam incorporates both a focused ion beam (FIB) and a scanning electron microscope (SEM) in a single system. This combination offers several advantages over a single-beam FIB system, especially for sample preparation and microscopy applications, in which the ion beam can be used for site-specific material removal and the SEM for nondestructive imaging and analysis. Dual-beam system configurations are presented, along with a number of key techniques and applications. These include precision cross-sectioning, TEM sample preparation, and automated 3D process control.
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Young, R.J., Moore, M.V. (2005). Dual-Beam (FIB-SEM) Systems. In: Giannuzzi, L.A., Stevie, F.A. (eds) Introduction to Focused Ion Beams. Springer, Boston, MA. https://doi.org/10.1007/0-387-23313-X_12
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DOI: https://doi.org/10.1007/0-387-23313-X_12
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-387-23116-7
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