Abstract
Behavioral modeling languages can be used in different steps of top-down design and bottom-up verification of MEMS design. The available language facilities of VHDL-AMS and the requirements of the applied methods in this process are confronted. Especially the application of Kirchhoffian networks to model 3D movements is taken into account. The decisions that should be done at the beginning of the modeling process are discussed. This is especially important if models from different sources shall be combined later on. Experiences using available simulation engines are presented. A micro mechanical accelerometer and an electrostatic beam actuator are investigated. Therefore a set of basic elements for MEMS simulation was created.
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References
Senturia, S. D.: CAD Challenges for Microsensors, Microactuators, and Microsystems. Proceedings of the IEEE 86 (1998) 8, pp. 1611–1625.
Fedder, G. K.; Jing, Q.: A Hierachical Circuit-Level Design Methodology for Micromechanical Systems. IEEE Trans. on CAS-II 46 (1999) 10, pp. 1309–1315.
Fedder, G. K.: Top-Down Design of MEMS. Technical Proceedings of the International Conference on Modeling and Simulation of Microsystems (MSM 2000), San Diego, CA, March 27–29, 2000.
Oudinot, J.; Vaganay, C.; Robbe, M.; Radja, P.: Mixed-Signal ASIC top-down and bottom-up design methodology using VHDL-AMS. Proc. XV Conference on Design of Circuits and Integrated Systems, Montpellier, November 21–24, 2000.
Dewey, A.; Dussault, H. et al: Energy-Based Characterization of Micromechanical Systems (MEMS) and Component Modeling Using VHDL-AMS. Proc. Modeling and Simulation of Microsystems, Semiconductors, Sensors, and ssActuators (MSM 99), San Juan, Puerto Rico, April 19–21, 1999.
Neul, R.; Becker, U.; Lorenz, G.; Schwarz, P.; Haase, J.; Wünsche, S.: A modeling approach to include mechanical microsystem components into system simulation. Proc. Design, Automation and Test in Europe (DATE’98), Paris, February 1998, pp. 510–517.
Clark, J.V.; Zhou, N.; Pister, K.S.J.: MEMS Simulation using SUGAR v0.5. Tech. Digest, Solid-State and Actuator Workshop, Hilton Head Island SC, pp. 191–196, June 8–11, 1998.
Clark, J. V.; Bindel, D. et al: 3D MEMS Simulation Modeling Using Modified Nodal Analysis. Proc. of the Microscale Systems: Mechanics and Measurements Symposium, Orlando, June 8, 2000, pp. 68–75 (http://bsac.berkeley.edu/cadtools/sugar/sugar/).
Bai, Z.; Bindel, D. et al: New Numerical Techniques and Tools in SUGAR for 3D MEMS Simulation. Technical Proceedings of the International Conference on Modeling and Simulation of Microsystems (MSM 2001), Head Island, March 19–21, 2001 (http://bsac.berkeley.edu/cadtools/sugar/sugar/).
ADVance MS simulation engine of Mentor Graphics, Inc. (http://www.mentor.com/ams/adms.html)
Sheehan, B. N.: ENOR: Model Order Reduction of RLC Circuits Using Nodal Equations for Efficient Factorization. Proc. 36th Design Automation Conference, 1999, pp. 17–21.
Bao, M.-H.: Micro Mechanical Transducers. Pressure Sensors, Accelerometers, and Gyroscopes. Amsterdam: Elsevier Science, 2000.
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© 2003 Kluwer Academic Publishers
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Haase, J., Bastian, J., Reitz, S. (2003). VHDL-AMS in MEMS Design Flow. In: Villar, E., Mermet, J. (eds) System Specification & Design Languages. Springer, Boston, MA. https://doi.org/10.1007/0-306-48734-9_5
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DOI: https://doi.org/10.1007/0-306-48734-9_5
Publisher Name: Springer, Boston, MA
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