Summary
In summary, Table 7.3 lists some examples for the choice of typical characterization methods. This chapter has outlined the techniques that are commonly employed in the analysis of various properties of semiconductors. There is also a wide range of characterization techniques that are more specific and not as routinely employed, and there are those that are being continuously developed for specific applications. For general overviews and more details on various techniques, see Grasserbauer and Werner (1991), Brundle et al. (1992), and Schroder (1998). In addition to being outlined in these books, some specific characterization techniques are also discussed in more detail in the dedicated sources listed in Bibliography Section B3.
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© 2003 Kluwer Academic Publishers
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(2003). Characterization of Semiconductors. In: Semiconductor Materials. Microdevices. Springer, Boston, MA. https://doi.org/10.1007/0-306-47942-7_7
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DOI: https://doi.org/10.1007/0-306-47942-7_7
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