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Depth-profiled Positron Annihilation Spectroscopy of Thin Insulation Films

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New Directions in Antimatter Chemistry and Physics

Abstract

The various techniques of positron annihilation spectroscopy (PAS) may be among the best for characterizing pore size, pore distribution and interconnectivity in amorphous thin films. In particular, PAS is becoming recognized as a practical characterization method for low-k dielectric films in microelectronic materials research. We expect this area of PAS research to experience a significant increase in activity in the next decade. Many obstacles to using low energy positron beams to depth profile thin film insulators with positron annihilation spectroscopies (PAS) have recently been overcome.

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Authors and Affiliations

  1. Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI, 48109

    D. W. Gidley, K. G. Lynn, M. P. Petkov, M. H. Weber, J. N. Sun & A. F. Yee

  2. Department of Physics, Washington State University, Pullman, WA, 99164-2814

    K. G. Lynn, M. P. Petkov & M. H. Weber

  3. Center for Materials Research and Department of Mechanical and Materials Engineering, Washington State University, Pullman, WA, 99164-2711

    K. G. Lynn

Authors
  1. D. W. Gidley
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  2. K. G. Lynn
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  3. M. P. Petkov
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  4. M. H. Weber
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  5. J. N. Sun
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  6. A. F. Yee
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Editors and Affiliations

  1. Physics Department, University of California, San Diego, USA

    Clifford M. Surko (Professor of Physics) (Professor of Physics)

  2. Dipartimento di Chimica, Università di Roma “La Sapienza”, Rome, Italy

    Franco A. Gianturco (Professor of Chemical Physics) (Professor of Chemical Physics)

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© 2001 Kluwer Academic Publishers

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Gidley, D.W., Lynn, K.G., Petkov, M.P., Weber, M.H., Sun, J.N., Yee, A.F. (2001). Depth-profiled Positron Annihilation Spectroscopy of Thin Insulation Films. In: Surko, C.M., Gianturco, F.A. (eds) New Directions in Antimatter Chemistry and Physics. Springer, Dordrecht. https://doi.org/10.1007/0-306-47613-4_10

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  • DOI: https://doi.org/10.1007/0-306-47613-4_10

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-0-7923-7152-6

  • Online ISBN: 978-0-306-47613-6

  • eBook Packages: Springer Book Archive

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