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Fabrication and Layout of CMOS Integrated Circuits

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CMOS Logic Circuit Design
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Chapter Summary

High-speed CMOS circuit design is intimately related to the structures that can be fabricated on a silicon substrate and then be transferred to a manufacturing line for mass production. Many of the limitations found in modern chip design are related to the fabrication process.

As we have seen in our short discussion, the electrical characteristics of FETs are established by a fairly complex interplay of parameters and dependences in the process flow. Experienced design- ers always examine how these values affect the performance of a logic network, and try to work with a given set of electrical characteristics to achieve their goals. We will adhere to this philosophy through the remaining chapters of this book.

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References

  1. S. Campbell, The Science and Engineering of Microelectronic Fabrication, Oxford University Press, New York, 1996.

    Google Scholar 

  2. C.Y. Chang and S.M. Sze, ULSI Technology, McGraw-Hill Book Company, New York, 1996.

    Google Scholar 

  3. B. Ciciani (ed.), Manufacturing Yield Evaluation of Vlsi/Wsi Systems, IEEE Computer Society, 1995.

    Google Scholar 

  4. J-P. Colinge, Silicon-on-Insulator Technology, Kluwer Academic Publishers, Boston, 1990.

    Google Scholar 

  5. D. De Cogan, Design and Technology of Integrated Circuits, John Wiley & Sons, New York, 1990.

    Google Scholar 

  6. S.K. Ghandhi, VLSI Fabrication Principles, 2nd ed., John Wiley & Sons, New York, 1994.

    Google Scholar 

  7. R. K. Gulati and C.F. Hawkins (eds.), IDDQ Testing of VLSI Circuits, Kluwer Academic Publishers, Boston, 1993.

    Google Scholar 

  8. N. J. Jha and S. Kundu, Testing and Reliable Design of CMOS Circuits, Kluwer Academic Publishers, Boston, 1990.

    Google Scholar 

  9. M. Madou, Fundamentals of Microfabrication, CRC Press, 1997.

    Google Scholar 

  10. R. Rajsuman, Iddq Testing for Cmos Vlsi, The Artech House, 1995.

    Google Scholar 

  11. M. Sarrafzadeh and C.K. Wong, An Introduction to VLSI Physical Design, McGraw-Hill Book Company, New York, 1996.

    Google Scholar 

  12. N. Sherwani, Algorithms for VLSI Physical Design Automation, Kluwer Academic Publishers, Norwell, MA, 1993.

    Google Scholar 

  13. S.M. Sze, VLSI Technology, 2nd ed., McGraw-Hill Book Company, New York, 1988

    Google Scholar 

  14. R. Troutman, Latchup in CMOS Technology, Kluwer Academic Publishers, Boston, 1986.

    Google Scholar 

  15. J. P. Uyemura, Physical Design of CMOS Integrated Circuits Using L-Edit, PWS Publishers, Boston, 1995.

    Google Scholar 

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© 2002 Kluwer Academic Publishers

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(2002). Fabrication and Layout of CMOS Integrated Circuits. In: CMOS Logic Circuit Design. Springer, Boston, MA. https://doi.org/10.1007/0-306-47529-4_2

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  • DOI: https://doi.org/10.1007/0-306-47529-4_2

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-0-7923-8452-6

  • Online ISBN: 978-0-306-47529-0

  • eBook Packages: Springer Book Archive

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