Conclusions
The experiments and results presented here show that it is possible to implement sensors, based on ITO thin films, capable of detecting radiation of opportune wavelength. The realization is simple and economic and could yield robust and reliable devices. In this work we have examined the processing conditions, suitable to realize a film of ITO that can work as a sensor. The behavior of the film is connected to the photochemical properties of the sample, that is to oxidation-reduction processes, and in turn to the morphological structure and the stoicheometry of the deposited films, determined by process parameters.
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© 2002 Kluwer Academic Publishers
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Calì, C., Mosca, M. (2002). Idium Tin Oxide Films for Optical Sensors. In: Martellucci, S., Chester, A.N., Mignani, A.G. (eds) Optical Sensors and Microsystems. Springer, Boston, MA. https://doi.org/10.1007/0-306-47099-3_7
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DOI: https://doi.org/10.1007/0-306-47099-3_7
Publisher Name: Springer, Boston, MA
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