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Principles of the Electron Kinetics in Glow Discharges

Chapter
Part of the NATO Science Series: B book series (NSSB, volume 367)

Keywords

Inelastic Collision Elastic Collision Electron Distribution Function Glow Discharge Plasma Average Electron Energy 
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Copyright information

© Kluwer Academic Publishers 2002

Authors and Affiliations

  1. 1.St.-Petersburg State Technical UniversitySt.-PetersburgRussia

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