This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsPreview
Unable to display preview. Download preview PDF.
References
M. A. Lieberman and A. J. Lichtenberg. Principles of Plasma Discharges and Materials Processing. Wiley, New York, 1994.
Y. P. Raizer. Gas Discharge Physics. Springer-Verlag, Berlin, 1991.
Y. P. Raizer, M. N. Shneider, and N. A. Yatsenko. Radio-frequency capacitive discharges. CRC Press, Boca Raton, 1995.
V. A. Godyak. Soviet Radio Frequency Discharge Research. Delphic Associates, Inc., Falls Church, VA, 1986.
D. B. Graves. Plasma processing. IEEE Trans. Plasma Sci., 22(1):31–42, February 1994.
O. A. Popov and V. A. Godyak. Power dissipated in low-pressure radio-frequency discharge plasmas. J. Appl. Phys., 57(1):53–58, January 1985.
V. A. Godyak and R. B. Piejak. Abnormally low electron temperature and heating-mode transition in a low-pressure rf discharge at 13.56 MHz. Phys. Rev. Lett., 65(8):996–999, August 1990.
V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich. Measurements of electron energy distribution in low-pressure rf discharges. Plasma Sources Sci. Technol., 1(1):36–58, March 1992.
M. A. Lieberman. Analytical solution for capacitive rf sheath. IEEE Trans. Plasma Sci., 16(6):638–644, December 1988.
I. D. Kaganovich and L. D. Tsendin. Low-pressure rf discharge in the free-flight regime. IEEE Trans. Plasma Sci., 20(2):86–92, April 1992.
I. D. Kaganovich, V. I. Kolobov, and L. D. Tsendin. Stochastic electron heating in bounded radio-frequency plasmas. Appl. Phys. Lett., 69(25), December 1996.
M. M. Turner. Pressure heating of electrons in capacitively-coupled rf discharges. Phys. Rev. Lett., 75(7):1312–1315, August 1995.
M. M. Turner, D. A. W. Hutchinson, R. A. Doyle, and M. B. Hopkins. Heating mode transition induced by a magnetic field in a capacitive rf discharge. Phys. Rev. Lett., 76(12):2069–2072, March 1996.
C. K. Birdsall and A. B. Langdon. Plasma Physics via Computer Simulation. Adam Hilger, Bristol, 1991.
R. W. Hackney and J. W. Eastwood. Computer Simulation Using Particles. Adam Hilger, Bristol, 1988.
C. K. Birdsall. Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC. IEEE Trans. Plasma Sci., 19(2):65–85, April 1991.
V. Vahedi and M. Surendra. A Monte Carlo collision model for the particle-in-cell method: applications to argon and oxygen discharges. Comp. Phys. Comm., 87:178–198, 1995.
J. L. Pack, R. E. Voshall, A. V. Phelps, and L. E. Kline. Longitudinal electron diffusion coefficients in gases: Noble gases. J. Appl. Phys., 71(11):5363–5371, June 1992.
K. Tachibana. Excitation of the 1s 5, 1s 4, 1s 3, and 1s 2 levels of argon by low-energy electrons. Phy. Rev. A, 34(2):1007–1015, August 1986.
A. V. Phelps. Cross sections and swarm coefficients for nitrogen ions and neutrals in N2 and argon ions and neutrals in Ar for energies from 0.1 eV to 10 keV. J. Chem. Phys. Ref. Data, 20(3):557–573, 1991.
D. Vender and R. W. Boswell. Numerical modeling of low-pressure RF plasmas. IEEE Trans. Plasma Sci., 18(4):725–732, August 1990.
B. E. Cherrington. Gaseous Electronics and Gas Lasers. Pergamon Press, Oxford, 1979.
G. G. Lister, Y.-M. Li, and V. A. Godyak. Electrical conductivity in high-frequency plasmas. J. Appl. Phys., 79(12):8993–8997, June 1996.
V. Vahedi, C. K. Birdsall, M. A. Lieberman, G. DiPeso, and T. D. Rognlien Capacitive RF discharges modelled by particle-in-cell Monte Carlo simulation. II. Comparison with laboratory measurements of electron energy distribution functions. Plasma Sources Sci. Technol., 2:273–278, 1993.
V. A. Godyak and R. B. Piejak. Paradoxical spatial distribution of the electron temperature in a low pressure rf discharge. Appl. Phys. Lett., 63(23):3137–3139, December 1993.
J. M. Berger, W. A. Newcomb, J. M. Dawson, E. A. Frieman, R. M. Kulsrud, and A. Lenard. Heating of a confined plasma by oscillating electromagnetic fields. Phys. Fluids, 1(4):301–307, July-August 1958.
G. W. Hammett and F. W. Perkins. Fluid moment models for Landau damping with application to the ion-temperature-gradient instability. Phys. Rev. Lett., 64(25):3019–3022, June 1990.
M. Surendra and M. Dalvie. Moment analysis of rf parallel-plate-discharge simulations using the particle-in-cell with monte carlo collisions technique. Phy. Rev. E, 48(5):3914–3924, November 1993.
L. D. Landau and E. M. Lifshitz. Fluid Mechanics. Pergamon Press, Oxford, 1978.
M. Surendra and D. B. Graves. Electron accoustic waves in capacitively coupled, low-pressure rf glow discharges. Phys. Rev. Lett., 66(11):1469–1472, November 1991.
M. Surendra and D. Vender. Collisionless electron heating by radio-frequency plasma sheaths. Appl. Phys. Lett., 65(2):153–155, July 1994.
L. D. Landau. On the vibrations of the electronic plasma. J. Phys., 10(1), 1946.
A. F. Alexandrov, L. S. Bogdankevich, and A. A. Rukhadze. Priciples of Plasma Electrodynamics. Springer-Verlag, Berlin, 1984.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2002 Kluwer Academic Publishers
About this chapter
Cite this chapter
Turner, M.M. (2002). Collisionless Heating in Capacitively-Coupled Radio Frequency Discharges. In: Kortshagen, U., Tsendin, L.D. (eds) Electron Kinetics and Applications of Glow Discharges. NATO Science Series: B, vol 367. Springer, Boston, MA. https://doi.org/10.1007/0-306-47076-4_19
Download citation
DOI: https://doi.org/10.1007/0-306-47076-4_19
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-306-45822-4
Online ISBN: 978-0-306-47076-9
eBook Packages: Springer Book Archive