Collisionless Heating in Capacitively-Coupled Radio Frequency Discharges

Part of the NATO Science Series: B book series (NSSB, volume 367)


Periodic Model Electron Energy Distribution Function Ohmic Heating Hard Wall Electron Heating 
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© Kluwer Academic Publishers 2002

Authors and Affiliations

  1. 1.Plasma Research LaboratoryDublin City UniversityDublinIreland

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