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Collisionless Heating in Capacitively-Coupled Radio Frequency Discharges

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Part of the NATO Science Series: B book series (NSSB, volume 367)

Keywords

Periodic Model Electron Energy Distribution Function Ohmic Heating Hard Wall Electron Heating 
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References

  1. 1.
    M. A. Lieberman and A. J. Lichtenberg. Principles of Plasma Discharges and Materials Processing. Wiley, New York, 1994.Google Scholar
  2. 2.
    Y. P. Raizer. Gas Discharge Physics. Springer-Verlag, Berlin, 1991.Google Scholar
  3. 3.
    Y. P. Raizer, M. N. Shneider, and N. A. Yatsenko. Radio-frequency capacitive discharges. CRC Press, Boca Raton, 1995.Google Scholar
  4. 4.
    V. A. Godyak. Soviet Radio Frequency Discharge Research. Delphic Associates, Inc., Falls Church, VA, 1986.Google Scholar
  5. 5.
    D. B. Graves. Plasma processing. IEEE Trans. Plasma Sci., 22(1):31–42, February 1994.CrossRefADSGoogle Scholar
  6. 6.
    O. A. Popov and V. A. Godyak. Power dissipated in low-pressure radio-frequency discharge plasmas. J. Appl. Phys., 57(1):53–58, January 1985.CrossRefADSGoogle Scholar
  7. 7.
    V. A. Godyak and R. B. Piejak. Abnormally low electron temperature and heating-mode transition in a low-pressure rf discharge at 13.56 MHz. Phys. Rev. Lett., 65(8):996–999, August 1990.CrossRefADSGoogle Scholar
  8. 8.
    V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich. Measurements of electron energy distribution in low-pressure rf discharges. Plasma Sources Sci. Technol., 1(1):36–58, March 1992.CrossRefADSGoogle Scholar
  9. 9.
    M. A. Lieberman. Analytical solution for capacitive rf sheath. IEEE Trans. Plasma Sci., 16(6):638–644, December 1988.CrossRefADSGoogle Scholar
  10. 10.
    I. D. Kaganovich and L. D. Tsendin. Low-pressure rf discharge in the free-flight regime. IEEE Trans. Plasma Sci., 20(2):86–92, April 1992.ADSCrossRefGoogle Scholar
  11. 11.
    I. D. Kaganovich, V. I. Kolobov, and L. D. Tsendin. Stochastic electron heating in bounded radio-frequency plasmas. Appl. Phys. Lett., 69(25), December 1996.Google Scholar
  12. 12.
    M. M. Turner. Pressure heating of electrons in capacitively-coupled rf discharges. Phys. Rev. Lett., 75(7):1312–1315, August 1995.CrossRefADSGoogle Scholar
  13. 13.
    M. M. Turner, D. A. W. Hutchinson, R. A. Doyle, and M. B. Hopkins. Heating mode transition induced by a magnetic field in a capacitive rf discharge. Phys. Rev. Lett., 76(12):2069–2072, March 1996.CrossRefADSGoogle Scholar
  14. 14.
    C. K. Birdsall and A. B. Langdon. Plasma Physics via Computer Simulation. Adam Hilger, Bristol, 1991.CrossRefGoogle Scholar
  15. 15.
    R. W. Hackney and J. W. Eastwood. Computer Simulation Using Particles. Adam Hilger, Bristol, 1988.Google Scholar
  16. 16.
    C. K. Birdsall. Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC. IEEE Trans. Plasma Sci., 19(2):65–85, April 1991.CrossRefADSGoogle Scholar
  17. 17.
    V. Vahedi and M. Surendra. A Monte Carlo collision model for the particle-in-cell method: applications to argon and oxygen discharges. Comp. Phys. Comm., 87:178–198, 1995.ADSGoogle Scholar
  18. 18.
    J. L. Pack, R. E. Voshall, A. V. Phelps, and L. E. Kline. Longitudinal electron diffusion coefficients in gases: Noble gases. J. Appl. Phys., 71(11):5363–5371, June 1992.CrossRefADSGoogle Scholar
  19. 19.
    K. Tachibana. Excitation of the 1s 5, 1s 4, 1s 3, and 1s 2 levels of argon by low-energy electrons. Phy. Rev. A, 34(2):1007–1015, August 1986.ADSCrossRefGoogle Scholar
  20. 20.
    A. V. Phelps. Cross sections and swarm coefficients for nitrogen ions and neutrals in N2 and argon ions and neutrals in Ar for energies from 0.1 eV to 10 keV. J. Chem. Phys. Ref. Data, 20(3):557–573, 1991.ADSCrossRefGoogle Scholar
  21. 21.
    D. Vender and R. W. Boswell. Numerical modeling of low-pressure RF plasmas. IEEE Trans. Plasma Sci., 18(4):725–732, August 1990.CrossRefADSGoogle Scholar
  22. 22.
    B. E. Cherrington. Gaseous Electronics and Gas Lasers. Pergamon Press, Oxford, 1979.Google Scholar
  23. 23.
    G. G. Lister, Y.-M. Li, and V. A. Godyak. Electrical conductivity in high-frequency plasmas. J. Appl. Phys., 79(12):8993–8997, June 1996.CrossRefADSGoogle Scholar
  24. 24.
    V. Vahedi, C. K. Birdsall, M. A. Lieberman, G. DiPeso, and T. D. Rognlien Capacitive RF discharges modelled by particle-in-cell Monte Carlo simulation. II. Comparison with laboratory measurements of electron energy distribution functions. Plasma Sources Sci. Technol., 2:273–278, 1993.ADSCrossRefGoogle Scholar
  25. 25.
    V. A. Godyak and R. B. Piejak. Paradoxical spatial distribution of the electron temperature in a low pressure rf discharge. Appl. Phys. Lett., 63(23):3137–3139, December 1993.CrossRefADSGoogle Scholar
  26. 26.
    J. M. Berger, W. A. Newcomb, J. M. Dawson, E. A. Frieman, R. M. Kulsrud, and A. Lenard. Heating of a confined plasma by oscillating electromagnetic fields. Phys. Fluids, 1(4):301–307, July-August 1958.MathSciNetzbMATHCrossRefADSGoogle Scholar
  27. 27.
    G. W. Hammett and F. W. Perkins. Fluid moment models for Landau damping with application to the ion-temperature-gradient instability. Phys. Rev. Lett., 64(25):3019–3022, June 1990.CrossRefADSGoogle Scholar
  28. 28.
    M. Surendra and M. Dalvie. Moment analysis of rf parallel-plate-discharge simulations using the particle-in-cell with monte carlo collisions technique. Phy. Rev. E, 48(5):3914–3924, November 1993.ADSCrossRefGoogle Scholar
  29. 29.
    L. D. Landau and E. M. Lifshitz. Fluid Mechanics. Pergamon Press, Oxford, 1978.Google Scholar
  30. 30.
    M. Surendra and D. B. Graves. Electron accoustic waves in capacitively coupled, low-pressure rf glow discharges. Phys. Rev. Lett., 66(11):1469–1472, November 1991.CrossRefADSGoogle Scholar
  31. 31.
    M. Surendra and D. Vender. Collisionless electron heating by radio-frequency plasma sheaths. Appl. Phys. Lett., 65(2):153–155, July 1994.CrossRefADSGoogle Scholar
  32. 32.
    L. D. Landau. On the vibrations of the electronic plasma. J. Phys., 10(1), 1946.Google Scholar
  33. 33.
    A. F. Alexandrov, L. S. Bogdankevich, and A. A. Rukhadze. Priciples of Plasma Electrodynamics. Springer-Verlag, Berlin, 1984.Google Scholar

Copyright information

© Kluwer Academic Publishers 2002

Authors and Affiliations

  1. 1.Plasma Research LaboratoryDublin City UniversityDublinIreland

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