The Anomalous Skin Effect in Bounded Systems
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We have described the state of the art of nonlocal electrodynamics of bounded discharge plasmas. We revived classical works on the anomalous skin effect to analyze peculiarities of the electromagnetic phenomena in weakly collisional ICPs. Our calculations corroborated nonmonotonic distributions of the electromagnetic fields and electron current density, the existence of negative power absorption, and other interesting phenomena recently observed in experiments. We have analyzed the effect of weak static magnetic fields on the penetration of rf fields into weakly-collisional ICPs.
The elaboration of nonlocal electrodynamics in bounded systems is important for the development of novel plasma reactors operating at gas pressures below 10 mTorr. Currently used models designed for collisional plasmas do not contain the nonlocal effects we have discussed. Our treatment was based on simple models. Further development of theory and numerical tools is required for simulation of practical devices.
KeywordsStatic Magnetic Field Skin Layer Skin Depth Skin Effect Plasma Resistance
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- 1.E.M. Lifshitz and L.P. Pitaevskii, Physical Kinetics, Pergamon Press, Oxford, 1981.Google Scholar
- 2.A.N. Kondratenko, Field Penetration into Plasmas, Atomizdat, Moscow, 1979, in Russian.Google Scholar
- 3.I.M. Lifshits, M.Ya. Azbel’, and M.I. Kaganov, Electron Theory of Metals, Consultants Bureau, New York-London, 1973.Google Scholar
- 4.P.M. Platzman and P.A. Wolff, Waves and Interactions in Solid State Plasmas, Academic Press, New York, 1973.Google Scholar
- 5.R.A. Demirkhanov, I. Kadysh, and Yu.S. Khodyrev, Sov. Phys. JETP 19, 791 (1964).Google Scholar
- 10.I.P. Shkarofsky, T.W. Johnson, and M.P. Bachinski, The Particle Kinetics of the Plasmas, Addison-Wesley, Reading, 1966.Google Scholar
- 12.B.D. Fried and S.D. Conte, The Plasma Dispersion Function, Academic Press, New York, 1961.Google Scholar
- 19.V.A. Godyak, Electron kinetics and electrodynamic characteristics of ICP in stochastic heating regime, in Electron Kinetics in Glow Discharges, edited by U. Kortschagen and L.D. Tsendin, Plenum Press, Inc., New York, 1997.Google Scholar
- 23.H.U. Eckert, The hundred year history of induction discharges, in Proc. 2nd Int Conf on Plasma Chem Technol., edited by H.V. Boenig, Lancaster, Pennsylvania, 1986, Technomic Publishing Company, Inc.Google Scholar
- 24.B. Joye and H. Schneider, Helvetica Physica Acta 51, 804 (1978).Google Scholar
- 27.B.E. Meierovich, Soviet Physics JETP 10, 782 (1970).Google Scholar