Conclusion
We have described the state of the art of nonlocal electrodynamics of bounded discharge plasmas. We revived classical works on the anomalous skin effect to analyze peculiarities of the electromagnetic phenomena in weakly collisional ICPs. Our calculations corroborated nonmonotonic distributions of the electromagnetic fields and electron current density, the existence of negative power absorption, and other interesting phenomena recently observed in experiments. We have analyzed the effect of weak static magnetic fields on the penetration of rf fields into weakly-collisional ICPs.
The elaboration of nonlocal electrodynamics in bounded systems is important for the development of novel plasma reactors operating at gas pressures below 10 mTorr. Currently used models designed for collisional plasmas do not contain the nonlocal effects we have discussed. Our treatment was based on simple models. Further development of theory and numerical tools is required for simulation of practical devices.
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Kolobov, V. (2002). The Anomalous Skin Effect in Bounded Systems. In: Kortshagen, U., Tsendin, L.D. (eds) Electron Kinetics and Applications of Glow Discharges. NATO Science Series: B, vol 367. Springer, Boston, MA. https://doi.org/10.1007/0-306-47076-4_18
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DOI: https://doi.org/10.1007/0-306-47076-4_18
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