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Collisionless Electron Heating in RF Gas Discharges: II. The Role of Collisions and Non-linear Effects

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Book cover Electron Kinetics and Applications of Glow Discharges

Part of the book series: NATO Science Series: B ((NSSB,volume 367))

Conclusions

  1. 1.

    It is shown that when λ > L, only resonance particles (ωL/πv x = n) contribute to the heating and as result for large velocities, where the fraction of resonance particles is small, collisionless heating is suppressed.

  2. 2.

    A plateau in the distribution function in the region of first resonance can be observed.

  3. 3.

    At smaller collision frequency the nonlinear effects should be accounted for. If kicks are perpendicular to the discharge boundaries a considerable suppression of collisionless heating appears due to nonlinear effects. In this case collisionless heating is proportional to collision frequency (D ~ v).

on leave from St. Petersburg Technical University, Physical Technical Department, Polytechnicheskaya 29, 195251 St. Petersburg, Russia

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Authors and Affiliations

  1. Experimental Physics II, Ruhr-University, 44780, Bochum, Germany

    U. Buddemeier & I. D. Kaganovich

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  1. U. Buddemeier
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  2. I. D. Kaganovich
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Editors and Affiliations

  1. University of Minnesota, Minneapolis, Minnesota, USA

    Uwe Kortshagen

  2. St. Petersburg State Technical University, St. Petersburg, Russia

    Lev D. Tsendin

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© 2002 Kluwer Academic Publishers

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Buddemeier, U., Kaganovich, I.D. (2002). Collisionless Electron Heating in RF Gas Discharges: II. The Role of Collisions and Non-linear Effects. In: Kortshagen, U., Tsendin, L.D. (eds) Electron Kinetics and Applications of Glow Discharges. NATO Science Series: B, vol 367. Springer, Boston, MA. https://doi.org/10.1007/0-306-47076-4_17

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  • DOI: https://doi.org/10.1007/0-306-47076-4_17

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-0-306-45822-4

  • Online ISBN: 978-0-306-47076-9

  • eBook Packages: Springer Book Archive

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