Collisionless Electron Heating in RF Gas Discharges: II. The Role of Collisions and Non-linear Effects
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It is shown that when λ > L, only resonance particles (ωL/πv x = n) contribute to the heating and as result for large velocities, where the fraction of resonance particles is small, collisionless heating is suppressed.
A plateau in the distribution function in the region of first resonance can be observed.
At smaller collision frequency the nonlinear effects should be accounted for. If kicks are perpendicular to the discharge boundaries a considerable suppression of collisionless heating appears due to nonlinear effects. In this case collisionless heating is proportional to collision frequency (D ~ v).
KeywordsCollision Frequency Electron Distribution Function Plasma Boundary Electron Heating Average Diffusion Coefficient
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- 8.A.V. Timofeev, Cyclotron oscillations of an equilibrium plasma in: “Review of Plasma Physics v.14” ed. B.B. Kadomtsev, Consultants Bureau, New York-London (1989).Google Scholar
- 12.M.A. Lieberman and A.J. Lichtenberg, ”Principles of Plasma Discharges and Materials Processing”, John Wiley & Sons Inc., New York (1994)Google Scholar
- 14.Y. M. Aliev, I. D. Kaganovich, and H. Schlüter, Collisionless electron heating in RF gas discharges: I Quasilinear theory, in this bookGoogle Scholar
- 16.A. P. Dmitriev and L. D. Tsendin, Distribution functions of electrons scattered with a large energy loss in an electric field, Sov. Phys JETP 54: 1071 (1981).Google Scholar