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References
V.A. Godyak, Statistical heating of electrons at an oscillating plasma boundary, Sov. Phys. Tech. Phys. 16: 1073 (1972).
M.A. Lieberman and A.J. Lichtenberg, “Principles of Plasma Discharges and Materials Processing”, John Wiley & Sons Inc., New York (1994)
A.F. Alexandrov, L.S. Bogdankevich and A.A. Rukhadze, ”Principles of Plasma Electrodynamics”, Springer Series in Electrophysics vol. 9, Berlin-Heidelberg-New York: Springer (1984).
A.A. Galeev and R.Z. Sagdeev, “Nonlinear Plasma Theory”, in: M.A. Leontovich (ed.), Reviews of Plasma Physics vol. 7, New York-London: Consultants Bureau, (1976).
A.A. Vedenov, “Theory of a Weakly Turbulent Plasma”, in: M.A. Leontovich (ed.), Reviews of Plasma Physics vol. 3, New York-London: Consultants Bureau, (1967).
A.H. Vedenov, E.P. Velikhov and R. Sagdeev, Nonlinear oscillations of rare plasma, Nucl. Fusion 1: 82 (1961).
W.E. Drummond and D. Pines, Nucl. Fusion Suppl. 3: 1049 (1962).
L.M. Kovrizhnykh and A. Sakharov, Electron acceleration in the field of plasma resonance, Sov. J. Plasma Phys. 5: 470 (1979).
V.V. Vas’kov, A.B. Gurevich, Ja.S. Dimant, Multiply acceleration of electrons in plasma resonance, Sov. Phys. JETP 57: 310 (1983).
Yu.R. Alanakyan, Fermi acceleration and rf particle heating, Sov. Phys. Tech. Phys. 24: 611 (1979).
Yu.R. Alanakyan, Electron energy distribution in a free-streaming rf plasma column, Sov, J. Plasma Phys. 5: 504 (1979).
C.G. Goedde, A.J. Lichtenberg and M.A. Lieberman, Self-consistent stochastic electron heating in radio frequency discharges, J. Appl. Phys. 64: 4375 (1988).
V.A. Godyak and R.B. Piejak, Abnormally low electron energy and heating-mode transition in a low-pressure Argon rf discharge at 13.56 MHz, Phys. Rev. Lett. 65: 996 (1990).
U. Buddemeier, U. Kortshagen and I. Pukropski, On the efficiency of the electron sheath heating in a capacitively coupled radio frequency discharges in the weakly collisional regime, J. Appl. Phys. Lett. 67: 191 (1995).
Yu.M. Aliev, V.Yu. Bychenkov, A.V. Maximov and H. Schlüter, High energy electron generation in surface-wave produced plasmas, Plasma Sources Sci. Technol. 1: 126 (1992).
Yu.M. Aliev, Some aspects of nonlinear theory of ionizing surface plasma waves, in: CM. Ferreira and M. Moisan (eds.), ”Microwave Discharges: Fundamentals and Applications”, NATO ASI Ser. B: Phys. vol. 302 (Plenum, 1993), 105–115.
Yu.M. Aliev, A.V. Maximov, U. Kortshagen, H, Schlüter and A. Shivarova, Modeling of microwave discharges in the presence of plasma resonances, Phys. Rev. E 51: 6091 (1995).
I.B. Bernstein and T. Holstein, Electron energy distribution in stationary discharges, Phys. Rev. 94: 1475 (1954).
L.D. Tsendin, Electron kinetics in non-uniform glow discharge plasma, Plasma Sources Sci. Technol. 4: 200 (1995).
I.D. Kaganovich, V.I. Kolobov, L.D. Tsendin, Stochastic electron heating in bounded radio-frequency plasmas, J. Appl. Phys. Lett. 69: 3818 (1996).
R.H. Cohen and T.D. Rognlien, Electron kinetics in radio-frequency magnetic fields of inductive plasma sources, Plasma Sources Sci. Techn. 5: 442 (1996).
V. Vahedi, M.A. Lieberman, G. Di Peso, T.D. Rognlien and D. Hewett, Analytic model of power deposition in inductively coupled plasma sources, J. Appl. Phys. 78: 1446 (1995).
M.J. Fish, Confining a tokamak plasma with rf-driven currents, Phys. Rev. Lett. 41: 873 (1978).
I.D. Kaganovich and L.D. Tsendin, The space-time-averaging procedure and modeling of the rf discharge, part II: model of collisional low-pressure rf discharge, IEEE Trans. Plasma Sci. 20: 66 (1992).
U. Buddemeier, I. Kaganovich, Collisionless electron heating in RF gas discharges. II. Role of collisions and non-linear effects, in this book.
A.I. Akhiezer and A.S. Bakai, Theory of stochastic particle acceleration, Sov. Phys. Dokl. 16: 1065 (1972).
S.M. Dikman and B.E. Meierovich, Theory of the anomalous skin effect in a plasma with a diffuse boundary, Sov. Phys.-JEPT, vol. 37, 835 (1973).
M.M. Turner, Collisionless electron heating in a inductively coupled discharge, Phys. Rev. Lett. 71: 1844 (1993).
V.A. Godyak, R.B. Piejak and B.M. Alexandrovich, Electrical characteristics and electron heating mechanism of an inductively coupled argon discharge, Plasma Sources Sci. Technol. 3: 169 (1994).
R.Z. Sagdeev, D.A. Usikov and G.M. Zaslavsky, “Nonlinear Physics from the Pendulum to Turbulence and Chaos” Chur: Harwood Academic Publishers (1988).
M.A. Lieberman, B.E. Meierovich and L.P. Pitaevski, Anomalous skin effect in a plasma with a diffuse boundary, Sov. Phys. JEPT 35: 904 (1972).
I.D. Kaganovich and L.D. Tsendin, Low pressure rf discharge in the free flight regime, IEEE Trans. Plasma Sci. 20: 86 (1992).
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Aliev, Y.M., Kaganovich, I.D., Schlüter, H. (2002). Collisionless Electron Heating in RF Gas Discharges: I. Quasilinear Theory. In: Kortshagen, U., Tsendin, L.D. (eds) Electron Kinetics and Applications of Glow Discharges. NATO Science Series: B, vol 367. Springer, Boston, MA. https://doi.org/10.1007/0-306-47076-4_16
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