Abstract
Mathematical models are developed to calculate the surface roughness of focused-ion-beam (FIB) sputtered surface. The surface roughness is the combination of the beam function and the material function. The beam function includes ion type, acceleration voltage, ion flux, intensity distribution, dwell time, etc; the material function includes the inherent material properties related to FIB micromachining. Surface of FIB sputtered (100) silicon was characterized using atomic force microscope. Reasonable agreement between the calculated and measured surface roughness was found.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Ali M. Y., Hung N. P., Yuan S. Simulation of Micro-Injection Molding, Proc. of the Int. Conf. on Precision Eng., Singapore, 2000; 535–40.
Ehrfeld W., Lehr H. Deep X-ray Lithography for the Production of Three-dimensional Microstructures from Metals, Polymers and Ceramics, Radiat. Phys. Chem 1995; 45(3): 349–65.
Hung N. P., Ali M. Y., Yuan S. Producing LIGA-Competitive Microcomponents, Proc. of the Int. Conf. on Micromachining and Microfabrication Process Tech. VI, 2000; SPIE 4174:49–57.
Nassar R., Vasile M. J., Zhang W. Mathematical Modeling of Focused Ion Beam Microfabrication, J. of Vac. Sc. and Tech. B 1998; 16(1): 109–15.
Sato M. “Resolution.” Handbook of Charged Panicles Optics, J. Orloff, ed. NY: CRC Press, 1997.
Prewett P.D and Mair G.L.R. Focused Ion Beam From Liquid Metal Ion Sources, John Wiley, 1991.
Sigmund P. “Sputtering by Ion Bombardment: Theoretical Concepts.” In Sputtering by Particle Bombardment I, R. Behrisch, ed. NY: Springer-Verlag, 1981.
Vasile M. J., Niu Z., Nassar R., Zhang W., Liu S. Focused Ion Beam Milling: Depth Control for Three-dimensional Microfabrication, J. of Vac. Sc. and Tech. B 1997; 15(6): 2350–54.
Weber L., Ehrfeld W, Ferimuth H., Lacher M., Lehr H., Pech B. Micro Molding-A Powerful Tool for the Large Scale Production of Precise Microstructure, Proc. of the Int. Conf. on Micromachining and Microfabrication Process Tech. II, 1996, SPIE 2879: 156–67.
Whitehouse D. J. Handbook of Surface Metrology, Philadelphia, Institute of Physics Publishing, 1994.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2002 Kluwer Academic Publishers
About this chapter
Cite this chapter
Ali, M.Y., Hung, N.P., Yuan, S. (2002). Surface Roughness of FIB Sputtered Silicon. In: Inasaki, I. (eds) Initiatives of Precision Engineering at the Beginning of a Millennium. Springer, Boston, MA. https://doi.org/10.1007/0-306-47000-4_28
Download citation
DOI: https://doi.org/10.1007/0-306-47000-4_28
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-7923-7414-5
Online ISBN: 978-0-306-47000-4
eBook Packages: Springer Book Archive